发明授权
- 专利标题： Probe needle, method for manufacturing the probe needle and method for constructing a three-dimensional structure
- 专利标题（中）： 探针，探针的制造方法以及构造三维结构的方法
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申请号： US12576111申请日： 2009-10-08
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公开(公告)号： US08159256B2公开(公告)日： 2012-04-17
- 发明人: Tomohisa Hoshino , Hiroyuki Hashimoto , Muneo Harada
- 申请人： Tomohisa Hoshino , Hiroyuki Hashimoto , Muneo Harada
- 申请人地址： JP Tokyo
- 专利权人： Tokyo Electron Limited
- 当前专利权人： Tokyo Electron Limited
- 当前专利权人地址： JP Tokyo
- 代理机构： Finnegan, Henderson, Farabow, Garrett & Dunner LLP
- 优先权： JP2004-251081 20040830
- 主分类号： G01R31/02
- IPC分类号： G01R31/02
摘要：
A method for manufacturing a probe needle having beams and a contactor placed on tips of the beams comprises preparing a Si wafer 20, forming a seed layer 21 on the Si wafer 20, and forming grooves in a desired shape of the beams on the seed layer 21 by patterning a photoresist 23. Subsequently, the grooves are filled up with metal-plated layers 24a, 24b to form the desired shape of beams.
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