Invention Grant
- Patent Title: Surface inspection method and surface inspection apparatus
- Patent Title (中): 表面检查方法和表面检查装置
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Application No.: US12964833Application Date: 2010-12-10
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Publication No.: US08160352B2Publication Date: 2012-04-17
- Inventor: Shigeru Matsui
- Applicant: Shigeru Matsui
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Current Assignee Address: JP Tokyo
- Agency: Miles & Stockbridge P.C.
- Priority: JP2007-235518 20070911
- Main IPC: G06K9/00
- IPC: G06K9/00

Abstract:
A surface inspection apparatus capable of acquiring scattered light intensity distribution information for each scattering azimuth angle, and detecting foreign matters and defects with high sensitivity. A concave mirror for condensation and another concave mirror for image formation are used to cope with a broad cubic angle. Since mirrors for condensation and image formation are used, a support for clamping the periphery of a lens is unnecessary, and an effective aperture area does not decrease. A plurality of azimuth-wise detection optical systems is disposed and reflected light at all azimuths can be detected by burying the entire periphery without calling for specific lens polishing. A light signal unification unit sums digital data from a particular system corresponding to a scattering azimuth designated in advance in the systems for improving an S/N ratio.
Public/Granted literature
- US20110075135A1 SURFACE INSPECTION METHOD AND SURFACE INSPECTION APPARATUS Public/Granted day:2011-03-31
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