Invention Grant
US08164057B2 Interface, a method for observing an object within a non-vacuum environment and a scanning electron microscope 有权
界面,在非真空环境中观察物体的方法和扫描电子显微镜

  • Patent Title: Interface, a method for observing an object within a non-vacuum environment and a scanning electron microscope
  • Patent Title (中): 界面,在非真空环境中观察物体的方法和扫描电子显微镜
  • Application No.: US12446757
    Application Date: 2007-10-23
  • Publication No.: US08164057B2
    Publication Date: 2012-04-24
  • Inventor: Dov Shachal
  • Applicant: Dov Shachal
  • Agency: Stein McEwen, LLP
  • International Application: PCT/IL2007/001265 WO 20071023
  • International Announcement: WO2008/050321 WO 20080502
  • Main IPC: G01N23/00
  • IPC: G01N23/00
Interface, a method for observing an object within a non-vacuum environment and a scanning electron microscope
Abstract:
An interface, a scanning electron microscope and a method for observing an object that is positioned in a non-vacuum environment. The method includes: passing at least one electron beam that is generated in a vacuum environment through at least one aperture out of an aperture array and through at least one ultra thin membrane that seals the at least one aperture; wherein the at least one electron beam is directed towards the object; wherein the at least one ultra thin membrane withstands a pressure difference between the vacuum environment and the non-vacuum environment; and detecting particles generated in response to an interaction between the at least one electron beam and the object.
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