Invention Grant
- Patent Title: Interface, a method for observing an object within a non-vacuum environment and a scanning electron microscope
- Patent Title (中): 界面,在非真空环境中观察物体的方法和扫描电子显微镜
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Application No.: US12446757Application Date: 2007-10-23
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Publication No.: US08164057B2Publication Date: 2012-04-24
- Inventor: Dov Shachal
- Applicant: Dov Shachal
- Agency: Stein McEwen, LLP
- International Application: PCT/IL2007/001265 WO 20071023
- International Announcement: WO2008/050321 WO 20080502
- Main IPC: G01N23/00
- IPC: G01N23/00

Abstract:
An interface, a scanning electron microscope and a method for observing an object that is positioned in a non-vacuum environment. The method includes: passing at least one electron beam that is generated in a vacuum environment through at least one aperture out of an aperture array and through at least one ultra thin membrane that seals the at least one aperture; wherein the at least one electron beam is directed towards the object; wherein the at least one ultra thin membrane withstands a pressure difference between the vacuum environment and the non-vacuum environment; and detecting particles generated in response to an interaction between the at least one electron beam and the object.
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