公开(公告)号：US08492716B2

公开(公告)日：2013-07-23

申请号：US13120344

申请日：2009-09-24

Applicant: Dov Shachal ,  Rafi De Picciotto

Inventor： Dov Shachal ,  Rafi De Picciotto

IPC: G01N23/00

CPC classification number: H01J37/28 ,  H01J37/16 ,  H01J37/18 ,  H01J2237/0245 ,  H01J2237/164 ,  Y10T29/4973

Abstract: A vacuumed device that includes: a sealed housing, an electron beam source, an electron optic component, a thin membrane, and a detector. The thin membrane seals an aperture of the sealed housing. The sealed housing defines a vacuumed space in which vacuum is maintained. The electron beam source is configured to generate an electron beam that propagates within the vacuumed space, interacts with the electron optic component and passes through the thin membrane. A first portion of the sealed housing is shaped to fit a space defined by non-vacuumed scanning electron microscope components that are maintained in a non-vacuum environment.

Abstract translation: 一种真空装置，包括：密封壳体，电子束源，电子光学部件，薄膜和检测器。 薄膜密封密封外壳的孔。 密封的壳体限定了真空保持的真空空间。 电子束源被配置为产生在真空空间内传播的电子束，与电子光学部件相互作用并通过薄膜。 密封壳体的第一部分被成形为适合保持在非真空环境中的非真空扫描电子显微镜部件限定的空间。

公开(公告)号：US09076631B2

公开(公告)日：2015-07-07

申请号：US14302221

申请日：2014-06-11

Applicant: Dov Shachal

Inventor： Dov Shachal

IPC: H01J40/00 ,  H01J37/28 ,  H01J37/20 ,  H01J37/301

CPC classification number: H01J37/285 ,  H01J37/06 ,  H01J37/20 ,  H01J37/28 ,  H01J37/301 ,  H01J2237/006 ,  H01J2237/0458 ,  H01J2237/15 ,  H01J2237/164 ,  H01J2237/182 ,  H01J2237/2002 ,  H01J2237/2006 ,  H01J2237/2605 ,  H01J2237/28 ,  H01J2237/2801 ,  H01J2237/2806 ,  H01J2237/2807

Abstract: An interface, a scanning electron microscope and a method for observing an object that is positioned in a non-vacuum environment. The method includes: passing at least one electron beam that is generated in a vacuum environment through at least one aperture out of an aperture array and through at least one ultra thin membrane that seals the at least one aperture; wherein the at least one electron beam is directed towards the object; wherein the at least one ultra thin membrane withstands a pressure difference between the vacuum environment and the non-vacuum environment; and detecting particles generated in response to an interaction between the at least one electron beam and the object.

Abstract translation: 接口，扫描电子显微镜和用于观察位于非真空环境中的物体的方法。 该方法包括：使在真空环境中产生的至少一个电子束通过孔阵列中的至少一个孔并通过至少一个密封所述至少一个孔的超薄膜; 其中所述至少一个电子束被引向所述物体; 其中所述至少一个超薄膜承受真空环境和非真空环境之间的压力差; 以及检测响应于所述至少一个电子束和所述物体之间的相互作用而产生的微粒。

公开(公告)号：US08164057B2

公开(公告)日：2012-04-24

申请号：US12446757

申请日：2007-10-23

Applicant: Dov Shachal

Inventor： Dov Shachal

IPC: G01N23/00

CPC classification number: H01J37/285 ,  H01J37/06 ,  H01J37/20 ,  H01J37/28 ,  H01J37/301 ,  H01J2237/006 ,  H01J2237/0458 ,  H01J2237/15 ,  H01J2237/164 ,  H01J2237/182 ,  H01J2237/2002 ,  H01J2237/2006 ,  H01J2237/2605 ,  H01J2237/28 ,  H01J2237/2801 ,  H01J2237/2806 ,  H01J2237/2807

Abstract: An interface, a scanning electron microscope and a method for observing an object that is positioned in a non-vacuum environment. The method includes: passing at least one electron beam that is generated in a vacuum environment through at least one aperture out of an aperture array and through at least one ultra thin membrane that seals the at least one aperture; wherein the at least one electron beam is directed towards the object; wherein the at least one ultra thin membrane withstands a pressure difference between the vacuum environment and the non-vacuum environment; and detecting particles generated in response to an interaction between the at least one electron beam and the object.

Abstract translation: 接口，扫描电子显微镜和用于观察位于非真空环境中的物体的方法。 该方法包括：使在真空环境中产生的至少一个电子束通过孔阵列中的至少一个孔并通过至少一个密封所述至少一个孔的超薄膜; 其中所述至少一个电子束被引向所述物体; 其中所述至少一个超薄膜承受真空环境和非真空环境之间的压力差; 以及检测响应于所述至少一个电子束和所述物体之间的相互作用而产生的微粒。

公开(公告)号：US09287089B2

公开(公告)日：2016-03-15

申请号：US14687890

申请日：2015-04-15

Applicant: Dov Shachal

Inventor： Dov Shachal

IPC: G01N23/00 ,  H01J37/28 ,  H01J37/06

CPC classification number: H01J37/285 ,  H01J37/06 ,  H01J37/20 ,  H01J37/28 ,  H01J37/301 ,  H01J2237/006 ,  H01J2237/0458 ,  H01J2237/15 ,  H01J2237/164 ,  H01J2237/182 ,  H01J2237/2002 ,  H01J2237/2006 ,  H01J2237/2605 ,  H01J2237/28 ,  H01J2237/2801 ,  H01J2237/2806 ,  H01J2237/2807

Abstract: An interface, a scanning electron microscope and a method for observing an object that is positioned in a non-vacuum environment. The method includes: passing at least one electron beam that is generated in a vacuum environment through at least one aperture out of an aperture array and through at least one ultra thin membrane that seals the at least one aperture; wherein the at least one electron beam is directed towards the object; wherein the at least one ultra thin membrane withstands a pressure difference between the vacuum environment and the non-vacuum environment; and detecting particles generated in response to an interaction between the at least one electron beam and the object.

公开(公告)号：US06627886B1

公开(公告)日：2003-09-30

申请号：US09312271

申请日：1999-05-14

Applicant: Dov Shachal ,  Noam Dotan

Inventor： Dov Shachal ,  Noam Dotan

IPC: H01J37244

CPC classification number: H01J37/256 ,  H01J27/14 ,  H01J2237/2806 ,  Y10S977/881

Abstract: A system and a method for fast characterization of sample's material composition, which is especially beneficial for semiconductor fabrication. The material composition is characterized by analyzing secondary electrons emission from the sample. According to one feature, electron detector is used to collect secondary electrons emanating from the sample. The detector is controlled to collect a specific narrow band of secondary electrons, and the band is controlled to allow for collection of SE at different energies. Two modes are disclosed: spot mode and secondary electron spectroscopy material imaging (SESMI). In the spot mode, a spectrum of SE is obtained from a single spot on the sample, and its characteristics are investigated to obtain information of the material composition of the spot. In the SESMI mode, an SEM image of an area on the sample is obtained. The SE spectrum at each pixel is investigated and correlated to a particular spectrum group. The image is then coded according to the SE spectrum grouping. The coding is preferably a color coding.

Abstract translation: 用于快速表征样品材料组成的系统和方法，这对于半导体制造特别有利。 材料组成的特征在于分析来自样品的二次电子发射。 根据一个特征，使用电子检测器来收集从样品发出的二次电子。 控制检测器以收集特定窄带的二次电子，并且控制该带以允许以不同能量收集SE。 公开了两种模式：点模式和二次电子光谱材料成像（SESMI）。 在斑点模式下，从样品上的单个斑点获得SE光谱，并对其特征进行调查以获得斑点材料成分的信息。 在SESMI模式中，获得样品上的区域的SEM图像。 研究每个像素的SE谱，并与特定的光谱组相关。 然后根据SE光谱分组对图像进行编码。 编码优选是颜色编码。

公开(公告)号：US08779358B2

公开(公告)日：2014-07-15

申请号：US13449392

申请日：2012-04-18

Applicant: Dov Shachal

Inventor： Dov Shachal

IPC: G01N23/00

CPC classification number: H01J37/285 ,  H01J37/06 ,  H01J37/20 ,  H01J37/28 ,  H01J37/301 ,  H01J2237/006 ,  H01J2237/0458 ,  H01J2237/15 ,  H01J2237/164 ,  H01J2237/182 ,  H01J2237/2002 ,  H01J2237/2006 ,  H01J2237/2605 ,  H01J2237/28 ,  H01J2237/2801 ,  H01J2237/2806 ,  H01J2237/2807

Abstract: An interface, a scanning electron microscope and a method for observing an object that is positioned in a non-vacuum environment. The method includes: passing at least one electron beam that is generated in a vacuum environment through at least one aperture out of an aperture array and through at least one ultra thin membrane that seals the at least one aperture; wherein the at least one electron beam is directed towards the object; wherein the at least one ultra thin membrane withstands a pressure difference between the vacuum environment and the non-vacuum environment; and detecting particles generated in response to an interaction between the at least one electron beam and the object.

Abstract translation: 接口，扫描电子显微镜和用于观察位于非真空环境中的物体的方法。 该方法包括：使在真空环境中产生的至少一个电子束通过孔阵列中的至少一个孔并通过至少一个密封所述至少一个孔的超薄膜; 其中所述至少一个电子束被引向所述物体; 其中所述至少一个超薄膜承受真空环境和非真空环境之间的压力差; 以及检测响应于所述至少一个电子束和所述物体之间的相互作用而产生的微粒。

公开(公告)号：US08334510B2

公开(公告)日：2012-12-18

申请号：US13002448

申请日：2009-07-02

Applicant: Dov Shachal ,  Rafi De Picciotto

Inventor： Dov Shachal ,  Rafi De Picciotto

IPC: H01J37/28 ,  H01J37/20 ,  G01N23/00

CPC classification number: G01N23/22 ,  G01N2223/079 ,  G01N2223/08 ,  H01J37/228 ,  H01J37/256 ,  H01J37/28 ,  H01J2237/164 ,  H01J2237/208 ,  H01J2237/244 ,  H01J2237/2608 ,  H01J2237/2808

Abstract: An interface, a scanning electron microscope and a method for observing an object that is positioned in a non-vacuum environment. The method includes: generating an electron beam in the vacuum environment; scanning a region of the object with the electron beam while the object is located below an object holder; wherein the scanning comprises allowing the electron beam to pass through an aperture of an aperture array, pass through an ultra thin membrane that seals the aperture, and pass through the object holder; wherein the ultra thin membrane withstands a pressure difference between the vacuum environment and the non-vacuum environment; and detecting particles generated in response to an interaction between the electron beam and the object.

Abstract translation: 接口，扫描电子显微镜和用于观察位于非真空环境中的物体的方法。 该方法包括：在真空环境中产生电子束; 当物体位于物体保持器下方时用电子束扫描物体的区域; 其中所述扫描包括允许所述电子束穿过孔阵列的孔，穿过密封所述孔的超薄膜并穿过所述物体保持器; 其中所述超薄膜承受所述真空环境和所述非真空环境之间的压力差; 以及检测响应于电子束和物体之间的相互作用而产生的微粒。

公开(公告)号：US20120241608A1

公开(公告)日：2012-09-27

申请号：US13449392

申请日：2012-04-18

Applicant: Dov Shachal

Inventor： Dov Shachal

IPC: H01J37/28

CPC classification number: H01J37/285 ,  H01J37/06 ,  H01J37/20 ,  H01J37/28 ,  H01J37/301 ,  H01J2237/006 ,  H01J2237/0458 ,  H01J2237/15 ,  H01J2237/164 ,  H01J2237/182 ,  H01J2237/2002 ,  H01J2237/2006 ,  H01J2237/2605 ,  H01J2237/28 ,  H01J2237/2801 ,  H01J2237/2806 ,  H01J2237/2807

Abstract: An interface, a scanning electron microscope and a method for observing an object that is positioned in a non-vacuum environment. The method includes: passing at least one electron beam that is generated in a vacuum environment through at least one aperture out of an aperture array and through at least one ultra thin membrane that seals the at least one aperture; wherein the at least one electron beam is directed towards the object; wherein the at least one ultra thin membrane withstands a pressure difference between the vacuum environment and the non-vacuum environment; and detecting particles generated in response to an interaction between the at least one electron beam and the object.

Abstract translation: 接口，扫描电子显微镜和用于观察位于非真空环境中的物体的方法。 该方法包括：使在真空环境中产生的至少一个电子束通过孔阵列中的至少一个孔并通过至少一个密封所述至少一个孔的超薄膜; 其中所述至少一个电子束被引向所述物体; 其中所述至少一个超薄膜承受真空环境和非真空环境之间的压力差; 以及检测响应于所述至少一个电子束和所述物体之间的相互作用而产生的微粒。

公开(公告)号：US20110210247A1

公开(公告)日：2011-09-01

申请号：US13120344

申请日：2009-09-24

Applicant: Dov Shachal ,  Rafi De picciotto

Inventor： Dov Shachal ,  Rafi De picciotto

IPC: H01J37/28 ,  H01J3/14 ,  H01J3/26 ,  B23P6/00

CPC classification number: H01J37/28 ,  H01J37/16 ,  H01J37/18 ,  H01J2237/0245 ,  H01J2237/164 ,  Y10T29/4973

Abstract: A vacuumed device that includes: a sealed housing, an electron beam source, an electron optic component, a thin membrane, and a detector. The thin membrane seals an aperture of the sealed housing. The sealed housing defines a vacuumed space in which vacuum is maintained. The electron beam source is configured to generate an electron beam that propagates within the vacuumed space, interacts with the electron optic component and passes through the thin membrane. A first portion of the sealed housing is shaped to fit a space defined by non-vacuumed scanning electron microscope components that are maintained in a non-vacuum environment.

Abstract translation: 一种真空装置，包括：密封壳体，电子束源，电子光学部件，薄膜和检测器。 薄膜密封密封外壳的孔。 密封的壳体限定了真空保持的真空空间。 电子束源被配置为产生在真空空间内传播的电子束，与电子光学部件相互作用并通过薄膜。 密封壳体的第一部分被成形为适合保持在非真空环境中的非真空扫描电子显微镜部件限定的空间。

公开(公告)号：US20110168889A1

公开(公告)日：2011-07-14

申请号：US13002448

申请日：2009-07-02

Applicant: Dov Shachal ,  Rafi De Picciotto

Inventor： Dov Shachal ,  Rafi De Picciotto

IPC: G01N23/04 ,  G01N23/00

CPC classification number: G01N23/22 ,  G01N2223/079 ,  G01N2223/08 ,  H01J37/228 ,  H01J37/256 ,  H01J37/28 ,  H01J2237/164 ,  H01J2237/208 ,  H01J2237/244 ,  H01J2237/2608 ,  H01J2237/2808

Abstract: An interface, a scanning electron microscope and a method for observing an object that is positioned in a non-vacuum environment. The method includes: generating an electron beam in the vacuum environment; scanning a region of the object with the electron beam while the object is located below an object holder; wherein the scanning comprises allowing the electron beam to pass through an aperture of an aperture array, pass through an ultra thin membrane that seals the aperture, and pass through the object holder; wherein the ultra thin membrane withstands a pressure difference between the vacuum environment and the non-vacuum environment; and detecting particles generated in response to an interaction between the electron beam and the object.

Abstract translation: 接口，扫描电子显微镜和用于观察位于非真空环境中的物体的方法。 该方法包括：在真空环境中产生电子束; 当物体位于物体保持器下方时用电子束扫描物体的区域; 其中所述扫描包括允许所述电子束穿过孔阵列的孔，穿过密封所述孔的超薄膜并穿过所述物体保持器; 其中所述超薄膜承受所述真空环境和所述非真空环境之间的压力差; 以及检测响应于电子束和物体之间的相互作用而产生的微粒。