发明授权
US08164231B2 Electret device comprising electret film formed on main surface of substrate and electrostatic operating apparatus 有权
驻极体装置包括在基板的主表面上形成的驻极体膜和静电操作装置

  • 专利标题: Electret device comprising electret film formed on main surface of substrate and electrostatic operating apparatus
  • 专利标题(中): 驻极体装置包括在基板的主表面上形成的驻极体膜和静电操作装置
  • 申请号: US11936542
    申请日: 2007-11-07
  • 公开(公告)号: US08164231B2
    公开(公告)日: 2012-04-24
  • 发明人: Katsuji Mabuchi
  • 申请人: Katsuji Mabuchi
  • 申请人地址: JP Osaka
  • 专利权人: Sanyo Electric Co., Ltd.
  • 当前专利权人: Sanyo Electric Co., Ltd.
  • 当前专利权人地址: JP Osaka
  • 代理机构: Ditthavong Mori & Steiner, P.C.
  • 优先权: JP2006-305615 20061110; JP2007-268195 20071015
  • 主分类号: H02N1/00
  • IPC分类号: H02N1/00
Electret device comprising electret film formed on main surface of substrate and electrostatic operating apparatus
摘要:
An electret device includes a substrate formed with a plurality of recess portions on a main surface thereof and an electret film so formed on the main surface of the substrate as to cover at least inner surfaces of the recess portions.
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