Invention Grant
- Patent Title: Semiconductor integrated circuits including grating coupler for optical communication and methods of forming the same
- Patent Title (中): 包括用于光通信的光栅耦合器的半导体集成电路及其形成方法
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Application No.: US12684677Application Date: 2010-01-08
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Publication No.: US08165437B2Publication Date: 2012-04-24
- Inventor: Jung-Hyung Pyo , O-Kyun Kwon , Gyung-Ock Kim
- Applicant: Jung-Hyung Pyo , O-Kyun Kwon , Gyung-Ock Kim
- Applicant Address: KR Daejeon
- Assignee: Electronics and Telecommunications Research Institute
- Current Assignee: Electronics and Telecommunications Research Institute
- Current Assignee Address: KR Daejeon
- Priority: KR10-2007-0132341 20071217
- Main IPC: G02B6/34
- IPC: G02B6/34 ; G02B6/42

Abstract:
Provided are semiconductor integrated circuits including a grating coupler for optical communication and methods of forming the same. The semiconductor integrated circuit includes: a cladding layer disposed on a semiconductor substrate; a grating coupler including an optical waveguide on the cladding layer and a grating on the optical waveguide; and at least one reflector formed in the cladding layer below the grating.
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