Invention Grant
US08165437B2 Semiconductor integrated circuits including grating coupler for optical communication and methods of forming the same 有权
包括用于光通信的光栅耦合器的半导体集成电路及其形成方法

Semiconductor integrated circuits including grating coupler for optical communication and methods of forming the same
Abstract:
Provided are semiconductor integrated circuits including a grating coupler for optical communication and methods of forming the same. The semiconductor integrated circuit includes: a cladding layer disposed on a semiconductor substrate; a grating coupler including an optical waveguide on the cladding layer and a grating on the optical waveguide; and at least one reflector formed in the cladding layer below the grating.
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