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US08168509B2 Etching methods and methods of manufacturing a CMOS image sensor using the same 有权
使用其制造CMOS图像传感器的蚀刻方法和方法

Etching methods and methods of manufacturing a CMOS image sensor using the same
摘要：
In an etching method, a thin layer is formed on a first surface of a first substrate doped with first impurities having a first doping concentration. The thin layer is doped with second impurities having a second doping concentration lower than the first doping concentration. A second substrate is formed on the thin layer. A second surface of the first substrate is polished. The polished first substrate is cleaned using a cleaning solution including ammonia and deionized water. The cleaned first substrate is etched to expose the thin layer.
摘要（中）：

在蚀刻方法中，在掺杂有具有第一掺杂浓度的第一杂质的第一衬底的第一表面上形成薄层。 该薄层掺杂有具有低于第一掺杂浓度的第二掺杂浓度的第二杂质。 第二衬底形成在薄层上。 抛光第一衬底的第二表面。 使用包括氨和去离子水的清洁溶液清洁抛光的第一衬底。 蚀刻清洁的第一衬底以暴露薄层。

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