Invention Grant
- Patent Title: Methods of forming one transistor DRAM devices
- Patent Title (中): 形成一个晶体管DRAM器件的方法
-
Application No.: US12842703Application Date: 2010-07-23
-
Publication No.: US08168530B2Publication Date: 2012-05-01
- Inventor: Jae-Hun Jeong , Ki-Nam Kim , Soon-Moon Jung , Jae-Hoon Jang
- Applicant: Jae-Hun Jeong , Ki-Nam Kim , Soon-Moon Jung , Jae-Hoon Jang
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Myers Bigel Sibley & Sajovec, P.A.
- Priority: KR2007-11085 20070202
- Main IPC: H01L21/4763
- IPC: H01L21/4763

Abstract:
A one transistor DRAM device includes: a substrate with an insulating layer, a first semiconductor layer provided on the insulating layer and including a first source region and a first region which are in contact with the insulating layer and a first floating body between the first source region and the first drain region, a first gate pattern to cover the first floating body, a first interlayer dielectric to cover the first gate pattern, a second semiconductor layer provided on the first interlayer dielectric and including a second source region and a second drain region which are in contact with the first interlayer dielectric and a second floating body between the second source region and the second drain region, and a second gate pattern to cover the second floating body.
Public/Granted literature
- US20100330752A1 Methods of Forming One Transistor DRAM Devices Public/Granted day:2010-12-30
Information query
IPC分类: