发明授权
- 专利标题: Methods of forming one transistor DRAM devices
- 专利标题(中): 形成一个晶体管DRAM器件的方法
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申请号: US12842703申请日: 2010-07-23
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公开(公告)号: US08168530B2公开(公告)日: 2012-05-01
- 发明人: Jae-Hun Jeong , Ki-Nam Kim , Soon-Moon Jung , Jae-Hoon Jang
- 申请人: Jae-Hun Jeong , Ki-Nam Kim , Soon-Moon Jung , Jae-Hoon Jang
- 申请人地址: KR
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR
- 代理机构: Myers Bigel Sibley & Sajovec, P.A.
- 优先权: KR2007-11085 20070202
- 主分类号: H01L21/4763
- IPC分类号: H01L21/4763
摘要:
A one transistor DRAM device includes: a substrate with an insulating layer, a first semiconductor layer provided on the insulating layer and including a first source region and a first region which are in contact with the insulating layer and a first floating body between the first source region and the first drain region, a first gate pattern to cover the first floating body, a first interlayer dielectric to cover the first gate pattern, a second semiconductor layer provided on the first interlayer dielectric and including a second source region and a second drain region which are in contact with the first interlayer dielectric and a second floating body between the second source region and the second drain region, and a second gate pattern to cover the second floating body.
公开/授权文献
- US20100330752A1 Methods of Forming One Transistor DRAM Devices 公开/授权日:2010-12-30
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