发明授权
US08169058B2 Semiconductor device and method of stacking die on leadframe electrically connected by conductive pillars
有权
半导体器件和在导电框架上通过导电柱电连接的芯片堆叠的方法
- 专利标题: Semiconductor device and method of stacking die on leadframe electrically connected by conductive pillars
- 专利标题(中): 半导体器件和在导电框架上通过导电柱电连接的芯片堆叠的方法
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申请号: US12545357申请日: 2009-08-21
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公开(公告)号: US08169058B2公开(公告)日: 2012-05-01
- 发明人: Reza A. Pagaila , Byung Tai Do , Linda Pei Ee Chua
- 申请人: Reza A. Pagaila , Byung Tai Do , Linda Pei Ee Chua
- 申请人地址: SG Singapore
- 专利权人: STATS ChipPAC, Ltd.
- 当前专利权人: STATS ChipPAC, Ltd.
- 当前专利权人地址: SG Singapore
- 代理机构: Patent Law Group: Atkins & Associates, P.C.
- 代理商 Robert D. Atkins
- 主分类号: H01L23/58
- IPC分类号: H01L23/58
摘要:
A semiconductor device has a first semiconductor die mounted to a first contact pad on a leadframe or substrate with bumps. A conductive pillar is formed over a second semiconductor die. The second die is mounted over the first die by electrically connecting the conductive pillar to a second contact pad on the substrate with bumps. The second die is larger than the first die. An encapsulant is deposited over the first and second die. Alternatively, the conductive pillars are formed over the substrate around the first die. A heat sink is formed over the second die, and a thermal interface material is formed between the first and second die. An underfill material is deposited under the first semiconductor die. A shielding layer is formed between the first and second die. An interconnect structure can be formed over the second contact pad of the substrate.
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