发明授权
- 专利标题： Maintenance system, substrate processing apparatus, remote operation unit and communication method
- 专利标题（中）： 维护系统，基板处理装置，远程操作单元及通讯方式
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申请号： US12372347申请日： 2009-02-17
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公开(公告)号： US08171879B2公开(公告)日： 2012-05-08
- 发明人: Takuya Mori
- 申请人： Takuya Mori
- 申请人地址： JP Tokyo
- 专利权人： Tokyo Electron Limited
- 当前专利权人： Tokyo Electron Limited
- 当前专利权人地址： JP Tokyo
- 代理机构： Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- 优先权： JP2002-247525 20020827
- 主分类号： B05C5/02
- IPC分类号： B05C5/02
摘要：
A substrate processing apparatus having various types of elements including a substrate carrier member for performing a substrate processing; and a control section in which a remote operation information transmitted from a remote control unit in a remote place through a communication network is provided only when there is an allow setting of a remote operation by a worker of the substrate processing apparatus with the safety of the remote operation work being confirmed, and the various types of elements are controlled based on the provided remote operation information.
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