Invention Grant
US08173978B2 Method for controlling electron beam in multi-microcolumn and multi-microcolumn using the same 有权
用多微柱和多微柱控制电子束的方法

  • Patent Title: Method for controlling electron beam in multi-microcolumn and multi-microcolumn using the same
  • Patent Title (中): 用多微柱和多微柱控制电子束的方法
  • Application No.: US11571695
    Application Date: 2005-07-05
  • Publication No.: US08173978B2
    Publication Date: 2012-05-08
  • Inventor: Ho Seob KimByeng Jin Kim
  • Applicant: Ho Seob KimByeng Jin Kim
  • Applicant Address: KR
  • Assignee: Cebt Co., Ltd
  • Current Assignee: Cebt Co., Ltd
  • Current Assignee Address: KR
  • Agency: Park Law Firm
  • Agent John K. Park
  • Priority: KR10-2004-0052102 20040705; KR10-2004-0063303 20040811; KR10-2005-0047526 20050603
  • International Application: PCT/KR2005/002145 WO 20050705
  • International Announcement: WO2006/004374 WO 20060112
  • Main IPC: H01J37/08
  • IPC: H01J37/08
Method for controlling electron beam in multi-microcolumn and multi-microcolumn using the same
Abstract:
Provided is a method for controlling electron beams in a multi-microcolumn, in which unit microcolumns having an electron emitter, a lens, and a deflector are arranged in an n×m matrix. A voltage is uniformly or differentially applied to each electron emitter or extractor. The same control voltage or different voltages are applied to a region at coordinates in a control division area of each extractor to deflect the electron beams. Lens layers not corresponding to the extractors are collectively or individually controlled so as to efficiently control the electron beams of the unit microcolumn. Further, a multi-microcolumn using the method is provided.
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