发明授权
US08174082B2 Micromechanical component having multiple caverns, and manufacturing method
失效
具有多个洞穴的微机械部件及其制造方法
- 专利标题： Micromechanical component having multiple caverns, and manufacturing method
- 专利标题（中）： 具有多个洞穴的微机械部件及其制造方法
-
申请号： US11628100申请日： 2005-04-28
-
公开(公告)号： US08174082B2公开(公告)日： 2012-05-08
- 发明人: Frank Fischer , Eckhard Graf , Heiko Stahl , Hartmut Kueppers , Roland Scheuerer
- 申请人： Frank Fischer , Eckhard Graf , Heiko Stahl , Hartmut Kueppers , Roland Scheuerer
- 申请人地址： DE Stuttgart
- 专利权人： Robert Bosch GmbH
- 当前专利权人： Robert Bosch GmbH
- 当前专利权人地址： DE Stuttgart
- 代理机构： Kenyon & Kenyon LLP
- 优先权： DE102004027501 20040604
- 国际申请： PCT/EP2005/051917 WO 20050428
- 国际公布： WO2005/118463 WO 20051215
- 主分类号： H01L27/14
- IPC分类号： H01L27/14
摘要：
A micromechanical component having at least two caverns is provided, the caverns being delimited by the micromechanical component and a cap, and the caverns having different internal atmospheric pressures. The micromechanical component and cap are hermetically joined to one another at a first specifiable atmospheric pressure, then an access to at least one cavern is produced, and subsequently the access is hermetically closed off at a second specifiable atmospheric pressure.