发明授权
US08174751B2 Two frequency resonantly excited MEMS mirror for diode-laser marker
有权
用于二极管激光标记的双频共振激光MEMS镜
- 专利标题： Two frequency resonantly excited MEMS mirror for diode-laser marker
- 专利标题（中）： 用于二极管激光标记的双频共振激光MEMS镜
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申请号： US13085345申请日： 2011-04-12
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公开(公告)号： US08174751B2公开(公告)日： 2012-05-08
- 发明人: John H. Jerman
- 申请人： John H. Jerman
- 申请人地址： US CA Santa Clara
- 专利权人： Coherent, Inc.
- 当前专利权人： Coherent, Inc.
- 当前专利权人地址： US CA Santa Clara
- 代理机构： Morrison & Foerster LLP
- 主分类号： G02B26/08
- IPC分类号： G02B26/08
摘要：
Apparatus for marking a bitmap image on tape includes a scanning mirror which is incorporated in a micro-electro-mechanical system (MEMS). The MEMS is torsionally resonant at two frequencies one being about three time the other. The MEMS is excited to resonance by applying an AC signal to the actuators, causing the mirror to oscillate. The AC signal has components at the two frequencies. The magnitude and phase-relationship of the components can be selected such that the mirror oscillates in an approximation of a triangle-wave.
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