Invention Grant
US08175300B2 Micro-electromechanical systems (MEMS) microphone and method of manufacturing the same
有权
微机电系统(MEMS)麦克风及其制造方法相同
- Patent Title: Micro-electromechanical systems (MEMS) microphone and method of manufacturing the same
- Patent Title (中): 微机电系统(MEMS)麦克风及其制造方法相同
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Application No.: US12509411Application Date: 2009-07-24
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Publication No.: US08175300B2Publication Date: 2012-05-08
- Inventor: Jae Woo Lee , Kang Ho Park , Jong Dae Kim
- Applicant: Jae Woo Lee , Kang Ho Park , Jong Dae Kim
- Applicant Address: KR Daejeon
- Assignee: Electronics and Telecommunications Research Institute
- Current Assignee: Electronics and Telecommunications Research Institute
- Current Assignee Address: KR Daejeon
- Priority: KR10-2008-0131632 20081222
- Main IPC: H04R25/00
- IPC: H04R25/00

Abstract:
Provided are a micro-electromechanical systems (MEMS) microphone and a method of manufacturing the same. A manufacturing process is simplified compared to a conventional art using both upper and lower substrate processes. Since defects which may occur during manufacturing are reduced due to the simplified manufacturing process, the manufacturing throughput is improved, and since durability of the MEMS microphone is improved, system stability against the external environment is improved.
Public/Granted literature
- US20100158281A1 MICRO-ELECTROMECHANICAL SYSTEMS (MEMS) MICROPHONE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2010-06-24
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