Invention Grant
- Patent Title: Temperature measuring apparatus and temperature measuring method
- Patent Title (中): 温度测量仪和温度测量方法
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Application No.: US12043654Application Date: 2008-03-06
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Publication No.: US08182142B2Publication Date: 2012-05-22
- Inventor: Jun Abe , Tatsuo Matsudo , Chishio Koshimizu
- Applicant: Jun Abe , Tatsuo Matsudo , Chishio Koshimizu
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2007-057145 20070307
- Main IPC: G01J5/00
- IPC: G01J5/00 ; G01B9/02

Abstract:
A temperature measuring apparatus includes a light source, a first splitter, a second splitter, a reference beam reflector, an optical path length adjuster, a reference beam transmitting member, a first to an nth measuring beam transmitting member and a photodetector. The temperature measuring apparatus further includes an attenuator that attenuates the reference beam reflected from the reference beam reflector to thereby make an intensity thereof closer to an intensity of the measurement beam reflected from the temperature measurement object.
Public/Granted literature
- US20080304543A1 TEMPERATURE MEASURING APPARATUS AND TEMPERATURE MEASURING METHOD Public/Granted day:2008-12-11
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