Invention Grant
- Patent Title: Methods of manufacturing solid state image pickup devices
- Patent Title (中): 制造固态图像拾取装置的方法
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Application No.: US12911844Application Date: 2010-10-26
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Publication No.: US08183084B2Publication Date: 2012-05-22
- Inventor: Tetsuya Itano , Fumihiro Inui , Masanori Ogura
- Applicant: Tetsuya Itano , Fumihiro Inui , Masanori Ogura
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2002-275019 20020920
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A method of manufacturing a solid state image pickup device having a plurality of pixels each including a photoelectric conversion region for converting light into a signal charge, and a plurality of wiring layers including first and second wiring layers. The method includes steps of forming the first wiring layer as a pattern by dividing a desired pattern into a plurality of patterns, connecting the divided patterns, and exposing the plurality of patterns, and forming the second wiring layer as a pattern by batch exposure processing. A connecting position along which the divided patterns are connected is arranged in a pixel area in which the plurality of pixels are arranged. The wiring included in the first wiring layer is formed by a vertical direction wiring arranged in parallel with and not crossing the connecting position in the pixel area, and the wiring included in the second wiring layer is formed by a horizontal direction wiring arranged in parallel with and crossing the connecting position in the pixel area.
Public/Granted literature
- US20110045632A1 Methods of Manufacturing Solid State Image Pickup Devices Public/Granted day:2011-02-24
Information query
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