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US08189171B2 Plotting state adjusting method and device 有权
绘图状态调整方法及装置

Plotting state adjusting method and device
摘要:
It is possible to set an optical magnification capable of making a recording position shift amount with respect to Y direction of the plotting point formed by a micro mirror within an allowance range from the relationship between a Y-direction distance between mirror images obtained by projecting micro mirrors constituting a DMD onto a substrate, an inclination angle of the DMD, an image pattern recording pitch, and an optical magnification.
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