Invention Grant
- Patent Title: Method of making a multicomponent film
- Patent Title (中): 制造多组分薄膜的方法
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Application No.: US13023145Application Date: 2011-02-08
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Publication No.: US08193027B2Publication Date: 2012-06-05
- Inventor: Manchao Xiao , Liu Yang , Xinjian Lei , Iain Buchanan
- Applicant: Manchao Xiao , Liu Yang , Xinjian Lei , Iain Buchanan
- Applicant Address: US PA Allentown
- Assignee: Air Products and Chemicals, Inc.
- Current Assignee: Air Products and Chemicals, Inc.
- Current Assignee Address: US PA Allentown
- Agent Rosaleen P. Morris-Oskanian
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/06 ; H01L21/44 ; H01L21/469
Abstract:
Described herein is a method and liquid-based precursor composition for depositing a multicomponent film. In one embodiment, the method and compositions described herein are used to deposit Germanium Tellurium (GeTe), Antimony Tellurium (SbTe), Antimony Germanium (SbGe), Germanium Antimony Tellurium (GST), Indium Antimony Tellurium (IST), Silver Indium Antimony Tellurium (AIST), Cadmium Telluride (CdTe), Cadmium Selenide (CdSe), Zinc Telluride (ZnTe), Zinc Selenide (ZnSe), Copper indium gallium selenide (CIGS) films or other tellurium and selenium based metal compounds for phase change memory and photovoltaic devices.
Public/Granted literature
- US20120034767A1 Method of Making a Multicomponent Film Public/Granted day:2012-02-09
Information query
IPC分类:
