发明授权
- 专利标题： Method of making a multicomponent film
- 专利标题（中）： 制造多组分薄膜的方法
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申请号： US13023145申请日： 2011-02-08
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公开(公告)号： US08193027B2公开(公告)日： 2012-06-05
- 发明人: Manchao Xiao , Liu Yang , Xinjian Lei , Iain Buchanan
- 申请人： Manchao Xiao , Liu Yang , Xinjian Lei , Iain Buchanan
- 申请人地址： US PA Allentown
- 专利权人： Air Products and Chemicals, Inc.
- 当前专利权人： Air Products and Chemicals, Inc.
- 当前专利权人地址： US PA Allentown
- 代理商 Rosaleen P. Morris-Oskanian
- 主分类号： H01L21/00
- IPC分类号： H01L21/00 ; H01L21/06 ; H01L21/44 ; H01L21/469
摘要：
Described herein is a method and liquid-based precursor composition for depositing a multicomponent film. In one embodiment, the method and compositions described herein are used to deposit Germanium Tellurium (GeTe), Antimony Tellurium (SbTe), Antimony Germanium (SbGe), Germanium Antimony Tellurium (GST), Indium Antimony Tellurium (IST), Silver Indium Antimony Tellurium (AIST), Cadmium Telluride (CdTe), Cadmium Selenide (CdSe), Zinc Telluride (ZnTe), Zinc Selenide (ZnSe), Copper indium gallium selenide (CIGS) films or other tellurium and selenium based metal compounds for phase change memory and photovoltaic devices.
公开/授权文献
- US20120034767A1 Method of Making a Multicomponent Film 公开/授权日：2012-02-09