发明授权
- 专利标题： Hybrid ion source/multimode ion source
- 专利标题（中）： 混合离子源/多模离子源
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申请号： US12184082申请日： 2008-07-31
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公开(公告)号： US08193513B2公开(公告)日： 2012-06-05
- 发明人: William F. DiVergilio , Daniel R. Tieger , Michael A. Graf
- 申请人： William F. DiVergilio , Daniel R. Tieger , Michael A. Graf
- 申请人地址： US MA Beverly
- 专利权人： Axcelis Technologies, Inc.
- 当前专利权人： Axcelis Technologies, Inc.
- 当前专利权人地址： US MA Beverly
- 代理机构： Eschweiler & Associates, LLC
- 主分类号： H01J27/00
- IPC分类号： H01J27/00
摘要：
A hybrid ion source, comprising a source body configured to create plasma therein, from a first material, wherein the first material comprises one of monatomic gases, small molecule gases, large molecule gases, reactive gases, and solids, a low power plasma generation component operably associated with the source body, a high power plasma generation component operably associated with the source body and an extraction aperture configured to extract ions of the ion plasma from the source body.
公开/授权文献
- US20090032728A1 HYBRID ION SOURCE/MULTIMODE ION SOURCE 公开/授权日：2009-02-05
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