Invention Grant
- Patent Title: Resistance switching memory
- Patent Title (中): 电阻切换存储器
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Application No.: US12636794Application Date: 2009-12-14
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Publication No.: US08198620B2Publication Date: 2012-06-12
- Inventor: Frederick T. Chen , Ming-Jinn Tsai , Wei-Su Chen , Heng-Yuan Lee
- Applicant: Frederick T. Chen , Ming-Jinn Tsai , Wei-Su Chen , Heng-Yuan Lee
- Applicant Address: TW Hsinchu
- Assignee: Industrial Technology Research Institute
- Current Assignee: Industrial Technology Research Institute
- Current Assignee Address: TW Hsinchu
- Agency: Jianq Chyun IP Office
- Main IPC: H01L47/00
- IPC: H01L47/00 ; H01L29/02 ; H01L29/06

Abstract:
A resistance switching memory is introduced herein. The resistance switching memory includes a highly-insulating or resistance-switching material formed to cover the sidewall of a patterned metal line, and extended alongside a dielectric layer sidewall to further contact a portion of the top surface of the lower electrode. The other part of the top surface of the lower electrode is covered by an insulating layer between the top electrode and the lower electrode. An oxygen gettering metal layer in the lower electrode occupies a substantial central part of the top surface of the lower electrode and is partially covered by the highly-insulating or resistance-switching material. A switching area is naturally very well confined to the substantial central part of the oxygen gettering metal layer of the lower electrode.
Public/Granted literature
- US20110140067A1 RESISTANCE SWITCHING MEMORY Public/Granted day:2011-06-16
Information query
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