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US08201329B2 Apparatus and method for manufacturing semiconductor device 有权
半导体器件制造装置及方法

Apparatus and method for manufacturing semiconductor device
摘要:
The manufacturing apparatus of a semiconductor device includes a jig having a plurality of holders arranged in a row, a controller for controlling the pitch of the plurality of holders arranged in a row, a support means provided with a plurality of semiconductor integrated circuits, and a support means provided with a substrate having a plurality of elements. By mounting the semiconductor integrated circuits on the respective elements by using the jig having the plurality of holders arranged in a row, semiconductor devices are manufactured.
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