发明授权
- 专利标题: Liquid treatment apparatus
- 专利标题(中): 液体处理装置
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申请号: US12533743申请日: 2009-07-31
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公开(公告)号: US08201568B2公开(公告)日: 2012-06-19
- 发明人: Norihiro Ito , Hidemasa Aratake
- 申请人: Norihiro Ito , Hidemasa Aratake
- 申请人地址: JP Tokyo
- 专利权人: Tokyo Electron Limited
- 当前专利权人: Tokyo Electron Limited
- 当前专利权人地址: JP Tokyo
- 代理机构: Abelman, Frayne & Schwab
- 优先权: JP2008-203401 20080806
- 主分类号: B08B7/00
- IPC分类号: B08B7/00 ; B08B7/04 ; B08B3/00 ; B08B3/04
摘要:
Disclosed is a liquid treatment apparatus capable of effectively exhausting processing liquid atmosphere around a target object. The liquid treatment apparatus includes a container, a support part located within the container that supports the target object, a rotation driving mechanism to rotate the target object supported by the support part, a processing liquid supply mechanism to supply a processing liquid to the target object, and a rotation cup, which is located outside of the outer circumference of the target object and is rotatable together with the support part. A rotation exhaust cup is arranged above the rotation cup and is rotatable together with the rotation cup. A discharge mechanism discharges processing liquid atmosphere guided by the rotation cup and the rotation exhaust cup.
公开/授权文献
- US20100031980A1 LIQUID TREATMENT APPARATUS 公开/授权日:2010-02-11
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