Invention Grant
- Patent Title: Alignment apparatus and alignment method
- Patent Title (中): 对准装置和对准方法
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Application No.: US12818518Application Date: 2010-06-18
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Publication No.: US08205349B2Publication Date: 2012-06-26
- Inventor: Akihiko Nakamura , Junichi Katsuragawa , Satoshi Kobari , Tamotsu Sasaki
- Applicant: Akihiko Nakamura , Junichi Katsuragawa , Satoshi Kobari , Tamotsu Sasaki
- Applicant Address: JP Kanagawa
- Assignee: Tokyo Ohka Kogyo Co., Ltd.
- Current Assignee: Tokyo Ohka Kogyo Co., Ltd.
- Current Assignee Address: JP Kanagawa
- Agency: Wenderoth, Lind & Ponack, L.L.P.
- Priority: JP2009-147698 20090622
- Main IPC: G01D21/00
- IPC: G01D21/00

Abstract:
Provided is an alignment apparatus including holding and rotating means for holding an alignment object and rotating the alignment object, the alignment apparatus including supporting means for supporting that part of the alignment object being rotated which is different from that part of the alignment object which is held by the holding and rotating means. This makes it possible to align the alignment object highly accurately by preventing the alignment object from being deformed, e.g. bent, due to its own weight.
Public/Granted literature
- US20100319209A1 ALIGNMENT APPARATUS AND ALIGNMENT METHOD Public/Granted day:2010-12-23
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