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公开(公告)号：US20100319209A1
公开(公告)日：2010-12-23
申请号：US12818518
申请日：2010-06-18
IPC分类号： G01D21/00
摘要： Provided is an alignment apparatus including holding and rotating means for holding an alignment object and rotating the alignment object, the alignment apparatus including supporting means for supporting that part of the alignment object being rotated which is different from that part of the alignment object which is held by the holding and rotating means. This makes it possible to align the alignment object highly accurately by preventing the alignment object from being deformed, e.g. bent, due to its own weight.
摘要翻译： 本发明提供了一种对准装置，包括用于保持对准物体并旋转对准物体的保持和旋转装置，该对准装置包括支撑装置，用于支撑被旋转的对准物体的部分与被保持的对准物体的部分不同的部分 通过握持和旋转手段。 这使得可以通过防止对准物体变形而高度准确地对准对准物体，例如， 弯曲，由于自己的重量。
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公开(公告)号：US20130000852A1
公开(公告)日：2013-01-03
申请号：US13613384
申请日：2012-09-13
IPC分类号： B32B38/10
CPC分类号： B32B43/006 , B32B2457/14 , H01L21/67132 , H01L21/6715 , Y10T156/1111 , Y10T156/1121 , Y10T156/19 , Y10T156/1922
摘要： A stripping method for stripping a support plate from a laminate including a substrate and the support plate adhered to the wafer via an adhesive layer, in which the adhesive layer is formed from an adhesive compound soluble in a non-polar solvent or a highly polar solvent; and the stripping method includes supplying the non-polar solvent or the highly polar solvent, so that the non-polar solvent or the highly polar solvent is retained at least on an edge portion of that surface of the laminate which faces the support plate, and on a lateral surface of the laminate.
摘要翻译： 一种用于从包括基底和支撑板的层压板剥离支撑板的剥离方法，所述支撑板通过粘合剂层粘合到晶片上，其中粘合剂层由可溶于非极性溶剂或高极性溶剂的粘合剂形成 ; 并且剥离方法包括供给非极性溶剂或高极性溶剂，使得非极性溶剂或高极性溶剂至少保留在面向支撑板的层压体的该表面的边缘部分上，以及 在层压板的侧表面上。
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公开(公告)号：US08302651B2
公开(公告)日：2012-11-06
申请号：US13093412
申请日：2011-04-25
IPC分类号： B29C63/00
CPC分类号： B32B43/006 , B32B2457/14 , H01L21/67132 , H01L21/6715 , Y10T156/1111 , Y10T156/1121 , Y10T156/19 , Y10T156/1922
摘要： A stripping method for stripping a support plate from a laminate including a substrate and the support plate adhered to the wafer via an adhesive layer, in which the adhesive layer is formed from an adhesive compound soluble in a non-polar solvent or a highly polar solvent; and the stripping method includes the step of supplying the non-polar solvent or the highly polar solvent, so that the non-polar solvent or the highly polar solvent is retained at least on an edge portion of that surface of the laminate which faces the support plate, and on a lateral surface of the laminate.
摘要翻译： 一种用于从包括基底和支撑板的层压板剥离支撑板的剥离方法，所述支撑板通过粘合剂层粘合到晶片上，其中粘合剂层由可溶于非极性溶剂或高极性溶剂的粘合剂形成 ; 并且剥离方法包括供给非极性溶剂或高极性溶剂的步骤，使得非极性溶剂或高极性溶剂至少保留在层压体的面向支持体的表面的边缘部分上 板，并且在层压板的侧表面上。
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公开(公告)号：US08205349B2
公开(公告)日：2012-06-26
申请号：US12818518
申请日：2010-06-18
IPC分类号： G01D21/00
摘要： Provided is an alignment apparatus including holding and rotating means for holding an alignment object and rotating the alignment object, the alignment apparatus including supporting means for supporting that part of the alignment object being rotated which is different from that part of the alignment object which is held by the holding and rotating means. This makes it possible to align the alignment object highly accurately by preventing the alignment object from being deformed, e.g. bent, due to its own weight.
摘要翻译： 本发明提供了一种对准装置，包括用于保持对准物体并旋转对准物体的保持和旋转装置，该对准装置包括支撑装置，用于支撑被旋转的对准物体的部分与被保持的对准物体的部分不同的部分 通过握持和旋转手段。 这使得可以通过防止对准物体变形而高度准确地对准对准物体，例如， 弯曲，由于自己的重量。
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公开(公告)号：US08377256B2
公开(公告)日：2013-02-19
申请号：US13613384
申请日：2012-09-13
IPC分类号： B32B38/10
CPC分类号： B32B43/006 , B32B2457/14 , H01L21/67132 , H01L21/6715 , Y10T156/1111 , Y10T156/1121 , Y10T156/19 , Y10T156/1922
摘要： A stripping method for stripping a support plate from a laminate including a substrate and the support plate adhered to the wafer via an adhesive layer, in which the adhesive layer is formed from an adhesive compound soluble in a non-polar solvent or a highly polar solvent; and the stripping method includes supplying the non-polar solvent or the highly polar solvent, so that the non-polar solvent or the highly polar solvent is retained at least on an edge portion of that surface of the laminate which faces the support plate, and on a lateral surface of the laminate.
摘要翻译： 一种用于从包括基底和支撑板的层压板剥离支撑板的剥离方法，所述支撑板通过粘合剂层粘合到晶片上，其中粘合剂层由可溶于非极性溶剂或高极性溶剂的粘合剂形成 ; 并且剥离方法包括供给非极性溶剂或高极性溶剂，使得非极性溶剂或高极性溶剂至少保留在面向支撑板的层压体的该表面的边缘部分上，以及 在层压板的侧表面上。
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公开(公告)号：US20110259527A1
公开(公告)日：2011-10-27
申请号：US13093412
申请日：2011-04-25
IPC分类号： B32B38/10
CPC分类号： B32B43/006 , B32B2457/14 , H01L21/67132 , H01L21/6715 , Y10T156/1111 , Y10T156/1121 , Y10T156/19 , Y10T156/1922
摘要： A stripping method for stripping a support plate from a laminate including a substrate and the support plate adhered to the wafer via an adhesive layer, in which the adhesive layer is formed from an adhesive compound soluble in a non-polar solvent or a highly polar solvent; and the stripping method includes the step of supplying the non-polar solvent or the highly polar solvent, so that the non-polar solvent or the highly polar solvent is retained at least on an edge portion of that surface of the laminate which faces the support plate, and on a lateral surface of the laminate.
摘要翻译： 一种用于从包括基底和支撑板的层压板剥离支撑板的剥离方法，所述支撑板通过粘合剂层粘合到晶片上，其中粘合剂层由可溶于非极性溶剂或高极性溶剂的粘合剂形成 ; 并且剥离方法包括供给非极性溶剂或高极性溶剂的步骤，使得非极性溶剂或高极性溶剂至少保留在层压体的面向支持体的表面的边缘部分上 板，并且在层压板的侧表面上。
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