发明授权
- 专利标题: Cleaning liquid for lithography and method for forming wiring
- 专利标题(中): 光刻用清洗液及布线形成方法
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申请号: US12958295申请日: 2010-12-01
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公开(公告)号: US08206509B2公开(公告)日: 2012-06-26
- 发明人: Takahiro Eto , Takuya Ohhashi , Masaru Takahama , Daijiro Mori , Akira Kumazawa
- 申请人: Takahiro Eto , Takuya Ohhashi , Masaru Takahama , Daijiro Mori , Akira Kumazawa
- 申请人地址: JP Kawasaki-shi
- 专利权人: Tokyo Ohka Kogyo Co., Ltd.
- 当前专利权人: Tokyo Ohka Kogyo Co., Ltd.
- 当前专利权人地址: JP Kawasaki-shi
- 代理机构: Knobbe, Martens, Olson & Bear, LLP
- 优先权: JP2009-274394 20091202
- 主分类号: B08B3/04
- IPC分类号: B08B3/04 ; C11D7/32 ; C11D7/50
摘要:
Provided are a cleaning liquid for lithography that exhibits excellent corrosion suppression performance in relation to tungsten, and excellent removal performance in relation to a resist film or the like, and a method for forming a wiring using the cleaning liquid for lithography. The cleaning liquid for lithography according to the present invention includes a quaternary ammonium hydroxide, a water-soluble organic solvent, water, an inorganic salt and an anti-corrosion agent represented by a general formula (1) below. In the general formula (1), R1 represents an alkyl group or an aryl group having 1-17 carbon atoms, and R2 represents an alkyl group having 1-13 carbon atoms.
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