发明授权
- 专利标题: Optoelectronic device and the manufacturing method thereof
- 专利标题(中): 光电子器件及其制造方法
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申请号: US13021307申请日: 2011-02-04
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公开(公告)号: US08207550B2公开(公告)日: 2012-06-26
- 发明人: Shih-I Chen , Chia-Liang Hsu , Tzu-Chieh Hsu , Chun-Yi Wu , Chien-Fu Huang
- 申请人: Shih-I Chen , Chia-Liang Hsu , Tzu-Chieh Hsu , Chun-Yi Wu , Chien-Fu Huang
- 申请人地址: TW Hsinchu
- 专利权人: EPISTAR Corporation
- 当前专利权人: EPISTAR Corporation
- 当前专利权人地址: TW Hsinchu
- 代理机构: Muncy, Geissler, Olds & Lowe, PLLC
- 主分类号: H01L33/58
- IPC分类号: H01L33/58 ; H01L33/60
摘要:
One aspect of the present disclosure provides an optoelectronic device comprising a substrate; a first window layer on the substrate, having a first sheet resistance, a first thickness, and a first impurity concentration; a second window layer having a second sheet resistance, a second thickness, and a second impurity concentration; and a semiconductor system between the first window layer and the second window layer; wherein the second window layer comprises a semiconductor material different from the semiconductor system, and the second sheet resistance is greater than the first sheet resistance.One aspect of the present disclosure provides a method for manufacturing an optoelectronic device in accordance with the present disclosure. The method comprises the steps of providing a substrate; forming a semiconductor system on the substrate; forming a window layer on the semiconductor system, wherein the window layer comprises a semiconductor material different from the semiconductor system; selectively removing the window layer thereby forming a width difference between the window layer and the semiconductor system, and the width difference is greater than 1 micron.
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