Invention Grant
US08207585B2 Method for producing a micromechanical component and mircomechanical component 有权
微机械部件和微机械部件的制造方法

Method for producing a micromechanical component and mircomechanical component
Abstract:
A method is provided for producing a micromechanical component and a micromechanical component is provided, particularly a microphone, a micro-loudspeaker or a pressure sensor (an absolute pressure sensor or a relative pressure sensor) having a substrate and having a diaphragm pattern, for the production of the diaphragm pattern, process steps being provided that are compatible only with a circuit that is monolithically integrated into or on the substrate, a sacrificial pattern applied onto the substrate being removed for the production of the diaphragm pattern.
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