Invention Grant
- Patent Title: Method for producing a micromechanical component and mircomechanical component
- Patent Title (中): 微机械部件和微机械部件的制造方法
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Application No.: US12300544Application Date: 2007-04-03
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Publication No.: US08207585B2Publication Date: 2012-06-26
- Inventor: Roman Schlosser , Heribert Weber , Christoph Schelling
- Applicant: Roman Schlosser , Heribert Weber , Christoph Schelling
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102006022378 20060512
- International Application: PCT/EP2007/053221 WO 20070403
- International Announcement: WO2007/131836 WO 20071122
- Main IPC: H01L29/84
- IPC: H01L29/84

Abstract:
A method is provided for producing a micromechanical component and a micromechanical component is provided, particularly a microphone, a micro-loudspeaker or a pressure sensor (an absolute pressure sensor or a relative pressure sensor) having a substrate and having a diaphragm pattern, for the production of the diaphragm pattern, process steps being provided that are compatible only with a circuit that is monolithically integrated into or on the substrate, a sacrificial pattern applied onto the substrate being removed for the production of the diaphragm pattern.
Public/Granted literature
- US20090162619A1 METHOD FOR PRODUCING A MICROMECHANICAL COMPONENT AND MIRCOMECHANICAL COMPONENT Public/Granted day:2009-06-25
Information query
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