发明授权
- 专利标题: Copolymer for immersion lithography and compositions
- 专利标题(中): 用于浸渍光刻和组合物的共聚物
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申请号: US12445948申请日: 2007-10-30
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公开(公告)号: US08211615B2公开(公告)日: 2012-07-03
- 发明人: Takanori Yamagishi , Tomo Oikawa , Takayoshi Okada
- 申请人: Takanori Yamagishi , Tomo Oikawa , Takayoshi Okada
- 申请人地址: JP Tokyo
- 专利权人: Maruzen Petrochemical Co., Ltd.
- 当前专利权人: Maruzen Petrochemical Co., Ltd.
- 当前专利权人地址: JP Tokyo
- 代理机构: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- 优先权: JP2006-301462 20061107
- 国际申请: PCT/JP2007/001183 WO 20071030
- 国际公布: WO2008/056437 WO 20080515
- 主分类号: G03F7/039
- IPC分类号: G03F7/039 ; C08F224/00 ; C08F222/14 ; C08F222/20
摘要:
The present invention provides a copolymer which can prevent problems associated with immersion lithography (including occurrence of a pattern defect such as water mark, and variation in sensitivity or abnormal patterning due to elution of an additive such as a radiation-sensitive acid-generator) and which provides surface characteristics suitable for immersion lithography, and a composition containing the copolymer.The copolymer for immersion lithography has, at least, a repeating unit (A) that generates an alkali-soluble group by removing protecting group through action of an acid, and a repeating unit (B) having a lactone structure, wherein, when a solution of the copolymer in propylene glycol monomethyl ether acetate (hereinafter may be abbreviated as “PGMEA”) is applied to a wafer and then heated to form a thin film, and a 15-μL droplet of pure water is added onto the thin film, the inclination of the wafer at the time when the water droplet starts to move is 35° or less, or the contact angle of the top edge of the water droplet at the time when the water droplet starts to move is 64° or more.
公开/授权文献
- US20100047710A1 COPOLYMER FOR IMMERSION LITHOGRAPHY AND COMPOSITIONS 公开/授权日:2010-02-25
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