发明授权
US08211616B2 Positive resist composition and method of forming resist pattern
有权
正型抗蚀剂组合物和形成抗蚀剂图案的方法
- 专利标题: Positive resist composition and method of forming resist pattern
- 专利标题(中): 正型抗蚀剂组合物和形成抗蚀剂图案的方法
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申请号: US12500528申请日: 2009-07-09
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公开(公告)号: US08211616B2公开(公告)日: 2012-07-03
- 发明人: Hiroaki Shimizu , Tsuyoshi Nakamura , Yoshiyuki Utsumi , Keita Ishiduka , Kensuke Matsuzawa , Akiya Kawaue
- 申请人: Hiroaki Shimizu , Tsuyoshi Nakamura , Yoshiyuki Utsumi , Keita Ishiduka , Kensuke Matsuzawa , Akiya Kawaue
- 申请人地址: JP Kawasaki-shi
- 专利权人: Tokyo Ohka Kogyo Co., Ltd.
- 当前专利权人: Tokyo Ohka Kogyo Co., Ltd.
- 当前专利权人地址: JP Kawasaki-shi
- 代理机构: Knobbe Martens Olson & Bear LLP
- 优先权: JP2008-187716 20080718
- 主分类号: G03F7/039
- IPC分类号: G03F7/039 ; G03F7/20
摘要:
A positive resist composition including a resin component (A) having a structural unit (a0) represented by general formula (a0-1) (R represents a hydrogen atom, a C1-C5 alkyl group or a C1-C5 halogenated alkyl group; R1 represents a C3 or more branched alkyl group; and each of R2 and R3 independently represents an alkyl group, wherein R2 and R3 may be mutually bonded to form a polycyclic group) and/or general formula (a0-2) (R is the same as defined above; R8 represents a divalent linking group that contains no halogen atom; and R7 represents an acid dissociable, dissolution inhibiting group), and an acid generator (B1) consisting of a compound represented by general formula (b1) (Y1 represents a C1-C4 fluorinated alkylene group which may have a substituent; X represents a C3-C30 aliphatic cyclic group which may have a substituent; and A+ represents an organic cation).
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