发明授权
US08211735B2 Nano/microwire solar cell fabricated by nano/microsphere lithography
有权
通过纳米/微球光刻制造的纳米/微丝太阳能电池
- 专利标题: Nano/microwire solar cell fabricated by nano/microsphere lithography
- 专利标题(中): 通过纳米/微球光刻制造的纳米/微丝太阳能电池
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申请号: US12480163申请日: 2009-06-08
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公开(公告)号: US08211735B2公开(公告)日: 2012-07-03
- 发明人: William Graham , Supratik Guha , Oki Gunawan , George S. Tulevski , Kejia Wang , Ying Zhang
- 申请人: William Graham , Supratik Guha , Oki Gunawan , George S. Tulevski , Kejia Wang , Ying Zhang
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理商 Vazken Alexanian; Michael J. Chang, LLC
- 主分类号: H01L21/28
- IPC分类号: H01L21/28
摘要:
Techniques for fabricating nanowire/microwire-based solar cells are provided. In one, a method for fabricating a solar cell is provided. The method includes the following steps. A doped substrate is provided. A monolayer of spheres is deposited onto the substrate. The spheres include nanospheres, microspheres or a combination thereof The spheres are trimmed to introduce space between individual spheres in the monolayer. The trimmed spheres are used as a mask to pattern wires in the substrate. The wires include nanowires, microwires or a combination thereof A doped emitter layer is formed on the patterned wires. A top contact electrode is deposited over the emitter layer. A bottom contact electrode is deposited on a side of the substrate opposite the wires.
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