Invention Grant
- Patent Title: Method for manufacturing an EEPROM cell
- Patent Title (中): EEPROM单元的制造方法
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Application No.: US12326542Application Date: 2008-12-02
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Publication No.: US08222094B2Publication Date: 2012-07-17
- Inventor: Pascal Fornara
- Applicant: Pascal Fornara
- Applicant Address: FR Rousset
- Assignee: STMicroelectronics (Rousset) SAS
- Current Assignee: STMicroelectronics (Rousset) SAS
- Current Assignee Address: FR Rousset
- Agency: Wolf, Greenfield & Sacks, P.C.
- Priority: FR0759563 20071205
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L29/66

Abstract:
A method for manufacturing a cell of a non-volatile electrically erasable and programmable memory including a dual-gate MOS transistor. The method includes the steps of providing a semiconductor substrate covered with an insulating layer including a thinned down portion and having a first surface common with the substrate and a second surface opposite to the first surface; and incorporating nitrogen at the level of the second surface, whereby the maximum nitrogen concentration is closer to the second surface than to the first surface.
Public/Granted literature
- US20090146214A1 METHOD FOR MANUFACTURING AN EEPROM CELL Public/Granted day:2009-06-11
Information query
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