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US08222094B2 Method for manufacturing an EEPROM cell 有权
EEPROM单元的制造方法

Method for manufacturing an EEPROM cell
Abstract:
A method for manufacturing a cell of a non-volatile electrically erasable and programmable memory including a dual-gate MOS transistor. The method includes the steps of providing a semiconductor substrate covered with an insulating layer including a thinned down portion and having a first surface common with the substrate and a second surface opposite to the first surface; and incorporating nitrogen at the level of the second surface, whereby the maximum nitrogen concentration is closer to the second surface than to the first surface.
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