Invention Grant
- Patent Title: Light-assisted testing of an optoelectronic module
- Patent Title (中): 光电子模块的光辅助测试
-
Application No.: US12296055Application Date: 2007-04-04
-
Publication No.: US08222911B2Publication Date: 2012-07-17
- Inventor: Bernhard Gunter Mueller , Ralf Schmid , Matthias Brunner
- Applicant: Bernhard Gunter Mueller , Ralf Schmid , Matthias Brunner
- Applicant Address: DE Dresden
- Assignee: APPLIED MATERIALS GmbH
- Current Assignee: APPLIED MATERIALS GmbH
- Current Assignee Address: DE Dresden
- Agency: Patterson & Sheridan, LLP
- Priority: DE102006015714 20060404
- International Application: PCT/EP2007/003063 WO 20070404
- International Announcement: WO2007/115774 WO 20071018
- Main IPC: G01R31/305
- IPC: G01R31/305
Abstract:
The present invention relates to a device for testing an optoelectronic module, comprising a first source for generating an electromagnetic beam or particle beam, a second source for illuminating the optoelectronic module; and a detector. In addition, a method for testing an optoelectronic module is provided comprising illuminating the optoelectronic module, directing an electromagnetic beam or particle beam and detecting defects in the optoelectronic module. The illumination additional to the electromagnetic beam or particle beam makes defects visible which otherwise would not be detected.
Public/Granted literature
- US20090179656A1 LIGHT-ASSISTED TESTING OF AN OPTOELECTRONIC MODULE Public/Granted day:2009-07-16
Information query
