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公开(公告)号：US08222911B2
公开(公告)日：2012-07-17
申请号：US12296055
申请日：2007-04-04
IPC分类号： G01R31/305
CPC分类号： G02F1/1309 , G02F2001/136254
摘要： The present invention relates to a device for testing an optoelectronic module, comprising a first source for generating an electromagnetic beam or particle beam, a second source for illuminating the optoelectronic module; and a detector. In addition, a method for testing an optoelectronic module is provided comprising illuminating the optoelectronic module, directing an electromagnetic beam or particle beam and detecting defects in the optoelectronic module. The illumination additional to the electromagnetic beam or particle beam makes defects visible which otherwise would not be detected.
摘要翻译： 本发明涉及一种用于测试光电子模块的装置，包括用于产生电磁束或粒子束的第一源，用于照亮光电子模块的第二源; 和检测器。 此外，提供了一种用于测试光电子模块的方法，包括照亮光电子模块，引导电磁束或粒子束并检测光电子模块中的缺陷。 附加到电磁波束或粒子束的照明使缺陷可见，否则将不会被检测到。
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公开(公告)号：US20090179656A1
公开(公告)日：2009-07-16
申请号：US12296055
申请日：2007-04-04
IPC分类号： G01R31/305 , G01N23/225 , G01N21/88
CPC分类号： G02F1/1309 , G02F2001/136254
摘要： The present invention relates to a device for testing an optoelectronic module, comprising a first source for generating an electromagnetic beam or particle beam, a second source for illuminating the optoelectronic module; and a detector. In addition, a method for testing an optoelectronic module is provided comprising illuminating the optoelectronic module, directing an electromagnetic beam or particle beam and detecting defects in the optoelectronic module. The illumination additional to the electromagnetic beam or particle beam makes defects visible which otherwise would not be detected.
摘要翻译： 本发明涉及一种用于测试光电子模块的装置，包括用于产生电磁束或粒子束的第一源，用于照亮光电子模块的第二源; 和检测器。 此外，提供了一种用于测试光电子模块的方法，包括照亮光电子模块，引导电磁束或粒子束并检测光电子模块中的缺陷。 附加到电磁波束或粒子束的照明使缺陷可见，否则将不会被检测到。
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公开(公告)号：US08009299B2
公开(公告)日：2011-08-30
申请号：US11813334
申请日：2006-01-05
申请人： Matthias Brunner , Ralf Schmid , Bernhard Mueller , Axel Wenzel
发明人： Matthias Brunner , Ralf Schmid , Bernhard Mueller , Axel Wenzel
IPC分类号： G01B11/14
CPC分类号： G09G3/006 , G01R31/305 , G01R31/308 , G01R35/005 , H01J2237/2826
摘要： The invention relates to a method of calibration of the beam position of a corpuscular beam. A calibration body with structures is used, wherein the structures have a structure period PS in the plain section and within each structure there is a position L intended for the measurement. For the calibration, at least one detection signal each at structures in the plain section of the calibration body is generated, wherein the corpuscular beam is deflected with deflectors on beam target positions L1 with the beam target period P1, which is larger than half of the structure period PS, whereby a basic calibration is used for the control of the deflectors, and wherein the beam target deflections deviate either in the beam target period P1 from the structure period PS and/or in the beam target position L1 from the position L.
摘要翻译： 本发明涉及一种校准红细胞束的束位置的方法。 使用具有结构的校准体，其中结构在平坦部分中具有结构周期PS，并且在每个结构内具有用于测量的位置L. 对于校准，生成校准体的平坦部分中的结构处的至少一个检测信号，其中，粒子束在束目标位置L1上被偏转器偏转，其中光束目标周期P1大于 结构周期PS，由此使用基准校准来控制偏转器，并且其中光束目标偏转在光束目标周期P1中与结构周期PS和/或从位置L的光束目标位置L1偏离。
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公开(公告)号：US07973546B2
公开(公告)日：2011-07-05
申请号：US12826635
申请日：2010-06-29
申请人： Fayez E. Abboud , Sriram Krishnaswami , Benjamin M. Johnston , Hung T. Nguyen , Matthias Brunner , Ralf Schmid , John M. White , Shinichi Kurita , James C. Hunter
发明人： Fayez E. Abboud , Sriram Krishnaswami , Benjamin M. Johnston , Hung T. Nguyen , Matthias Brunner , Ralf Schmid , John M. White , Shinichi Kurita , James C. Hunter
IPC分类号： G01R31/302 , G01R31/305
CPC分类号： H01L21/67748 , H01J2237/2811 , H01J2237/2817 , H01L21/67201 , H01L21/67236
摘要： A method for testing a plurality of electronic devices formed on a large area substrate is described. In one embodiment, the method includes transferring a substrate on an end effector relative to a testing platform having a plurality of testing columns coupled thereto, the substrate having a plurality of electronic devices located thereon, and moving the substrate in a single directional axis relative to an optical axis of each of the plurality of testing columns, the single directional axis being substantially orthogonal to the optical axis to define a test area on the substrate, wherein the test area is configured to cover an entire length or an entire width of the substrate such that the testing columns are capable of testing the entire substrate as the substrate is moved through the test area.
摘要翻译： 描述了用于测试形成在大面积基板上的多个电子设备的方法。 在一个实施例中，所述方法包括相对于具有耦合到其上的多个测试柱的测试平台在端部执行器上传送衬底，所述衬底具有位于其上的多个电子器件，并且相对于 所述多个测试列中的每一个的光轴，所述单方向轴基本上垂直于所述光轴，以在所述衬底上限定测试区域，其中所述测试区域被配置为覆盖所述衬底的整个长度或整个宽度 使得当衬底移动通过测试区域时，测试柱能够测试整个衬底。
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公开(公告)号：US07256606B2
公开(公告)日：2007-08-14
申请号：US10977510
申请日：2004-10-29
申请人： Axel Wenzel , Ralf Schmid , Matthias Brunner
发明人： Axel Wenzel , Ralf Schmid , Matthias Brunner
IPC分类号： G01R31/00 , G01R31/307
CPC分类号： G01N23/2251 , G02F2001/136254
摘要： The present invention provides a method of electron beam testing of liquid crystal displays comprising non-uniform electrodes having a conductive portion and a dielectric portion. In accordance with methods of the present invention, the diameter of the electron beam is increased so that the beam is less focused, i.e., enlarged or “blurred,” over a non-uniform electrode area. The diameter of the beam is increased so that the beam generates secondary electrons from the conductive portion of the non-uniform electrode area. The configured test beam may be circular, elliptical, or other suitable shapes.
摘要翻译： 本发明提供了包括具有导电部分和电介质部分的不均匀电极的液晶显示器的电子束测试方法。 根据本发明的方法，电子束的直径增加，使得光束在非均匀电极区域上聚焦较少，即扩大或“模糊”。 光束的直径增加，使得光束从非均匀电极区域的导电部分产生二次电子。 配置的测试光束可以是圆形，椭圆形或其他合适的形状。
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公开(公告)号：US20100327162A1
公开(公告)日：2010-12-30
申请号：US12826635
申请日：2010-06-29
申请人： FAYEZ E. ABBOUD , Sriram Krishnaswami , Benjamin M. Johnston , Hung T. Nguyen , Matthias Brunner , Ralf Schmid , John M. White , Shinichi Kurita , James C. Hunter
发明人： FAYEZ E. ABBOUD , Sriram Krishnaswami , Benjamin M. Johnston , Hung T. Nguyen , Matthias Brunner , Ralf Schmid , John M. White , Shinichi Kurita , James C. Hunter
IPC分类号： G01N23/00
CPC分类号： H01L21/67748 , H01J2237/2811 , H01J2237/2817 , H01L21/67201 , H01L21/67236
摘要： A method and apparatus for testing a plurality of electronic devices formed on a large area substrate is described. In one embodiment, the apparatus performs a test on the substrate in one linear axis in at least one chamber that is slightly wider than a dimension of the substrate to be tested. Clean room space and process time is minimized due to the smaller dimensions and volume of the system.
摘要翻译： 描述了用于测试形成在大面积基板上的多个电子装置的方法和装置。 在一个实施例中，该装置在至少一个室内的一个线性轴线上对衬底进行测试，所述至少一个腔室比待测试衬底的尺寸略宽。 由于系统的尺寸和体积较小，洁净室空间和处理时间被最小化。
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公开(公告)号：US07319335B2
公开(公告)日：2008-01-15
申请号：US10889695
申请日：2004-07-12
申请人： Matthias Brunner , Shinichi Kurita , Ralf Schmid , Fayez (Frank) E. Abboud , Benjamin Johnston , Paul Bocian , Emanuel Beer
发明人： Matthias Brunner , Shinichi Kurita , Ralf Schmid , Fayez (Frank) E. Abboud , Benjamin Johnston , Paul Bocian , Emanuel Beer
IPC分类号： G01R31/305
CPC分类号： G09G3/006 , G01R31/2893 , G01R31/305
摘要： An improved prober for an electronic devices test system is provided. The prober is “configurable,” meaning that it can be adapted for different device layouts and substrate sizes. The prober generally includes a frame, at least one prober bar having a first end and a second end, a frame connection mechanism that allows for ready relocation of the prober bar to the frame at selected points along the frame, and a plurality of electrical contact pins along the prober bar for placing selected electronic devices in electrical communication with a system controller during testing. In one embodiment, the prober is be used to test devices such as thin film transistors on a glass substrate. Typically, the glass substrate is square, and the frame is also square. In this way, “x” and “y” axes are defined by the frame.
摘要翻译： 提供了一种用于电子设备测试系统的改进的探测器。 探测器是“可配置的”，这意味着它可以适用于不同的设备布局和基板尺寸。 探测器通常包括框架，至少一个具有第一端和第二端的探测杆，框架连接机构，其允许在沿着框架的选定点准备将探测杆重新定位到框架，以及多个电触点 沿着探测杆的引脚，用于在测试期间将选定的电子设备与系统控制器电连通。 在一个实施例中，探测器用于测试诸如玻璃基板上的薄膜晶体管的器件。 通常，玻璃基板是正方形的，框架也是正方形的。 以这种方式，“x”和“y”轴由框架定义。
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公开(公告)号：US20070296426A1
公开(公告)日：2007-12-27
申请号：US11746530
申请日：2007-05-09
申请人： SRIRAM KRISHNASWAMI , Matthias Brunner , William Beaton , Yong Liu , Benjamin Johnston , Hung Nguyen , Ludwig Ledl , Ralf Schmid
发明人： SRIRAM KRISHNASWAMI , Matthias Brunner , William Beaton , Yong Liu , Benjamin Johnston , Hung Nguyen , Ludwig Ledl , Ralf Schmid
IPC分类号： G01R31/02
CPC分类号： G01R31/2887 , G09G3/006 , G09G3/3208 , G09G3/3611
摘要： An apparatus and method for testing large area substrates is described. The large area substrates include patterns of displays and contact points electrically coupled to the displays on the large area substrate. The apparatus includes a prober assembly that is movable relative to the large area substrate and/or the contact points, and may be configured to test various patterns of displays and contact points on various large area substrates. The prober assembly is also configured to test fractional sections of the large area substrate positioned on a testing table, and the prober assembly may be configured for different display and contact point patterns without removing the prober assembly from the testing table.
摘要翻译： 描述了用于测试大面积基板的装置和方法。 大面积基板包括电耦合到大面积基板上的显示器的显示器图案和接触点。 该装置包括可相对于大面积基板和/或接触点移动的探测器组件，并且可以被配置为测试各种大面积基板上的各种显示图案和接触点。 探测器组件还被配置为测试位于测试台上的大面积衬底的小数部分，并且探针组件可以被配置为用于不同的显示和接触点图案，而不从测试台移除探测器组件。
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公开(公告)号：US20060028230A1
公开(公告)日：2006-02-09
申请号：US10977510
申请日：2004-10-29
申请人： Axel Wenzel , Ralf Schmid , Matthias Brunner
发明人： Axel Wenzel , Ralf Schmid , Matthias Brunner
IPC分类号： G01R31/00
CPC分类号： G01N23/2251 , G02F2001/136254
摘要： The present invention provides a method of electron beam testing of liquid crystal displays comprising non-uniform electrodes having a conductive portion and a dielectric portion. In accordance with methods of the present invention, the diameter of the electron beam is increased so that the beam is less focused, i.e., enlarged or “blurred,” over a non-uniform electrode area. The diameter of the beam is increased so that the beam generates secondary electrons from the conductive portion of the non-uniform electrode area. The configured test beam may be circular, elliptical, or other suitable shapes.
摘要翻译： 本发明提供了包括具有导电部分和电介质部分的不均匀电极的液晶显示器的电子束测试方法。 根据本发明的方法，电子束的直径增加，使得光束在非均匀电极区域上聚焦较少，即扩大或“模糊”。 光束的直径增加，使得光束从非均匀电极区域的导电部分产生二次电子。 配置的测试光束可以是圆形，椭圆形或其他合适的形状。
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公开(公告)号：US07847566B2
公开(公告)日：2010-12-07
申请号：US11940432
申请日：2007-11-15
申请人： Matthias Brunner , Shinichi Kurita , Ralf Schmid , Fayez (Frank) E. Abboud , Benjamin Johnston , Paul Bocian , Emanuel Beer
发明人： Matthias Brunner , Shinichi Kurita , Ralf Schmid , Fayez (Frank) E. Abboud , Benjamin Johnston , Paul Bocian , Emanuel Beer
IPC分类号： G01R31/26
CPC分类号： G09G3/006 , G01R31/2893 , G01R31/305
摘要： A method of testing electronic devices on substrates is described. The method includes placing a configurable prober over a first substrate, testing the first substrate, re-configuring the configurable prober, placing the configurable prober over a second substrate, and testing the second substrate.
摘要翻译： 描述了一种在基板上测试电子器件的方法。 该方法包括将可配置的探测器放置在第一衬底上，测试第一衬底，重新配置可配置的探测器，将可配置的探测器放置在第二衬底上，以及测试第二衬底。
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