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US08225681B2 Device for measuring superfine particle masses 有权
超微粒子质量测量装置

Device for measuring superfine particle masses
摘要:
A device for measuring superfine particle masses including a quartz oscillator and an exposure system having at least two measuring chambers. Each of the at least two measuring chambers has a same geometry, a deposition surface for particles, and an aerosol feed directed at the respective disposition surface configured to feed an aerosol onto the respective deposition surface. At least one of the respective deposition surfaces is disposed on the quartz oscillator.
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