发明授权
- 专利标题: Laser crystallization of amorphous silicon layer
- 专利标题(中): 非晶硅层的激光结晶
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申请号: US12970580申请日: 2010-12-16
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公开(公告)号: US08227326B2公开(公告)日: 2012-07-24
- 发明人: Kwang-Hae Kim , Moo-Jin Kim
- 申请人: Kwang-Hae Kim , Moo-Jin Kim
- 申请人地址: KR
- 专利权人: Samsung Mobile Display Co., Ltd.
- 当前专利权人: Samsung Mobile Display Co., Ltd.
- 当前专利权人地址: KR
- 代理机构: Knobbe Martens Olson & Bear LLP
- 优先权: KR10-2009-0128331 20091221
- 主分类号: H01L21/20
- IPC分类号: H01L21/20
摘要:
A crystallization method, a method of manufacturing a thin-film transistor, and a method of manufacturing a display device are provided. The crystallization method includes: forming a backup amorphous silicon layer on a substrate, forming nickel particles on the backup amorphous silicon layer, converting the backup amorphous silicon layer into an amorphous silicon layer by thermally processing the backup amorphous silicon layer so as to diffuse the nickel particles throughout said backup amorphous silicon layer; and irradiating the amorphous silicon layer with energy from a laser.
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