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US08231612B2 Method of making sub-surface photoalterations in a material 有权
在材料中制作表面光刻法的方法

Method of making sub-surface photoalterations in a material
摘要：
A method of photoaltering a material using a pulsed laser beam includes selecting a first pulse energy and a first focal point separation based on a relationship of pulse energy and focal point separation combinations enabling layer separation of the material by photoalteration, and scanning the pulsed laser beam along a scan region at the first pulse energy and the first focal point separation. The relationship has a slope and has a distinct change in the slope. The distinct change in the slope is associated with a second pulse energy of the relationships and the first pulse energy is equal to or less than the second pulse energy.
摘要（中）：

使用脉冲激光束对材料进行光刻反应的方法包括：基于脉冲能量和焦点分离组合的关系来选择第一脉冲能量和第一焦点分离，使得能够通过光反射进行材料层分离，并扫描脉冲激光束 沿着第一脉冲能量和第一焦点分离的扫描区域。 这个关系有一个斜率，斜率有明显的变化。 斜率的明显变化与关系的第二脉冲能量相关联，并且第一脉冲能量等于或小于第二脉冲能量。

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