发明授权
- 专利标题: Zinc oxide-based semiconductor device and method for producing same
- 专利标题(中): 氧化锌类半导体器件及其制造方法
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申请号: US12556914申请日: 2009-09-10
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公开(公告)号: US08232121B2公开(公告)日: 2012-07-31
- 发明人: Chizu Kyotani , Naochika Horio
- 申请人: Chizu Kyotani , Naochika Horio
- 申请人地址: JP Tokyo
- 专利权人: Stanley Electric Co., Ltd.
- 当前专利权人: Stanley Electric Co., Ltd.
- 当前专利权人地址: JP Tokyo
- 代理机构: Holtz, Holtz, Goodman & Chick, PC
- 优先权: JP2008-234578 20080912
- 主分类号: H01L21/00
- IPC分类号: H01L21/00 ; H01L29/12
摘要:
A semiconductor device that has excellent characteristics and mass productivity wherein the introduction of defects thereinto at the time of device separation is prevented, and a method for producing the semiconductor device. In particular, there is provided a high-performance semiconductor device having excellent luminous efficiency, longevity and mass productivity; and a method for producing this semiconductor device. The method for producing the semiconductor device has a step of forming, between a substrate comprising zinc oxide (ZnO) and a device operating layer, a defect-blocking layer having a crystal composition that is different from that of the substrate, and a step of forming device dividing grooves to a depth that goes beyond the defect-blocking layer, relative to the device operating layer side surface of the substrate on which the device operating layer is formed.
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