Invention Grant
US08234920B2 Angular velocity sensor having drive member coupling beam spaced apart from drive members 有权
角速度传感器具有与驱动构件间隔开的驱动构件联接梁

Angular velocity sensor having drive member coupling beam spaced apart from drive members
Abstract:
An angular velocity sensor includes first and second oscillators and a coupling beam. The coupling beam couples the first and second oscillators together in such a manner that the first and second oscillators vibrate relative to each other in a predetermined direction. The coupling beam includes a first post portion joined to a surface of the first oscillator, a second post portion joined to a surface of the second oscillator, and a spring portion that joins the first post portion to the second post portion. The spring portion is spaced from the first and second oscillators and has elasticity in the predetermined direction.
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