公开(公告)号：US20100050767A1

公开(公告)日：2010-03-04

申请号：US12585052

申请日：2009-09-01

申请人： Hirofumi Higuchi ,  Tetsuo Fujii ,  Masaki Inoue

发明人： Hirofumi Higuchi ,  Tetsuo Fujii ,  Masaki Inoue

IPC分类号： G01C19/56

CPC分类号： G01C19/5719

摘要： An angular velocity sensor includes first and second oscillators and a coupling beam. The coupling beam couples the first and second oscillators together in such a manner that the first and second oscillators vibrate relative to each other in a predetermined direction. The coupling beam includes a first post portion joined to a surface of the first oscillator, a second post portion joined to a surface of the second oscillator, and a spring portion that joins the first post portion to the second post portion. The spring portion is spaced from the first and second oscillators and has elasticity in the predetermined direction.

摘要翻译： 角速度传感器包括第一和第二振荡器和耦合梁。 耦合光束以第一和第二振荡器在预定方向上相对于彼此振动的方式将第一和第二振荡器耦合在一起。 耦合梁包括接合到第一振荡器的表面的第一柱部分，与第二振荡器的表面接合的第二柱部分，以及将第一柱部分连接到第二柱部分的弹簧部分。 弹簧部分与第一和第二振荡器间隔开，并且在预定方向上具有弹性。

公开(公告)号：US08234920B2

公开(公告)日：2012-08-07

申请号：US12585052

申请日：2009-09-01

申请人： Hirofumi Higuchi ,  Tetsuo Fujii ,  Masaki Inoue

发明人： Hirofumi Higuchi ,  Tetsuo Fujii ,  Masaki Inoue

IPC分类号： G01P9/04 ,  G01C19/56

CPC分类号： G01C19/5719

摘要： An angular velocity sensor includes first and second oscillators and a coupling beam. The coupling beam couples the first and second oscillators together in such a manner that the first and second oscillators vibrate relative to each other in a predetermined direction. The coupling beam includes a first post portion joined to a surface of the first oscillator, a second post portion joined to a surface of the second oscillator, and a spring portion that joins the first post portion to the second post portion. The spring portion is spaced from the first and second oscillators and has elasticity in the predetermined direction.

摘要翻译： 角速度传感器包括第一和第二振荡器和耦合梁。 耦合光束以第一和第二振荡器在预定方向上相对于彼此振动的方式将第一和第二振荡器耦合在一起。 耦合梁包括接合到第一振荡器的表面的第一柱部分，与第二振荡器的表面接合的第二柱部分，以及将第一柱部分连接到第二柱部分的弹簧部分。 弹簧部分与第一和第二振荡器间隔开，并且在预定方向上具有弹性。

公开(公告)号：US08413507B2

公开(公告)日：2013-04-09

申请号：US12801405

申请日：2010-06-08

申请人： Tetsuo Fujii ,  Hisanori Yokura ,  Hirofumi Higuchi

发明人： Tetsuo Fujii ,  Hisanori Yokura ,  Hirofumi Higuchi

IPC分类号： G01C19/56 ,  G01P15/125

CPC分类号： H01L27/1203 ,  B81B2201/025 ,  B81B2201/0257 ,  B81B2201/0285 ,  B81B2201/047 ,  B81C1/00182 ,  G01C19/5755 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0814 ,  H01L21/84

摘要： A semiconductor dynamic quantity sensor has a substrate including a semiconductor substrate, an insulation layer on a main surface of the semiconductor substrate, and a semiconductor layer on the insulation layer. The main surface has a projection that is trapezoidal or triangular in cross section. The semiconductor layer is divided by a through hole into a movable portion. A tip of the projection is located directly below the movable portion and spaced from the movable portion by a predetermined distance in a thickness direction of the substrate. A width of the tip of the projection is less than a width of the movable portion in a planar direction of the substrate. The distance between the tip of the projection and the movable portion is equal to a thickness of the insulation layer.

摘要翻译： 半导体动态量传感器具有包括半导体衬底，半导体衬底的主表面上的绝缘层和绝缘层上的半导体层的衬底。 主表面具有横截面为梯形或三角形的突起。 半导体层由通孔分割成可动部。 突出部的尖端位于可动部的正下方，与基板的厚度方向与可动部隔开预定的距离。 突起的尖端的宽度小于基板的平面方向上的可动部的宽度。 突起的尖端和可动部之间的距离等于绝缘层的厚度。

公开(公告)号：US08210040B2

公开(公告)日：2012-07-03

申请号：US12722707

申请日：2010-03-12

申请人： Hirofumi Higuchi ,  Akitoshi Yamanaka ,  Tetsuo Fujii

发明人： Hirofumi Higuchi ,  Akitoshi Yamanaka ,  Tetsuo Fujii

IPC分类号： G01C19/56 ,  G01P9/04 ,  G01P1/02

CPC分类号： G01C19/5719

摘要： An oscillating angular speed sensor includes a detector, a driving portion, and a separating portion. When an angular speed is generated while the detector is driven to oscillate by the driving portion, Coriolis force is applied to the detector. Therefore, the angular speed is detected based on a capacitance variation in accordance with a variation of an interval between a movable electrode and a fixed electrode of the detector. The separating portion is distanced from the detector and the driving portion, and is configured to separate a first space accommodating the detector and a second space accommodating the driving portion.

摘要翻译： 振动角速度传感器包括检测器，驱动部分和分离部分。 当检测器被驱动部分驱动振荡时产生角速度时，将科里奥利力施加到检测器。 因此，根据检测器的可动电极和固定电极之间的间隔的变化，基于电容变化来检测角速度。 分离部分远离检测器和驱动部分，并且被配置为分离容纳检测器的第一空间和容纳驱动部分的第二空间。

公开(公告)号：US08578761B2

公开(公告)日：2013-11-12

申请号：US12733694

申请日：2009-03-25

申请人： Kenji Fukumura ,  Tetsuo Yoshioka ,  Tetsuo Fujii ,  Takaaki Kawai ,  Hirofumi Higuchi ,  Teruo Oda ,  Yasuyuki Okuda

发明人： Kenji Fukumura ,  Tetsuo Yoshioka ,  Tetsuo Fujii ,  Takaaki Kawai ,  Hirofumi Higuchi ,  Teruo Oda ,  Yasuyuki Okuda

IPC分类号： G01N33/00

CPC分类号： G01N27/226 ,  G01N33/28

摘要： A concentration sensor device includes a sensor unit, a substrate, and a sedimentation limit unit. The sensor unit detects a concentration of a specific component contained in liquid. The substrate has a face to which the sensor unit is arranged. The sedimentation limit unit is integrally arranged with the sensor unit or arranged at an upstream side of the sensor unit in a flowing direction of the liquid. The sedimentation limit unit is configured to prevent sedimentation of a foreign object on the sensor unit. The sedimentation limit unit includes a piezoelectric element to vibrate when electricity is supplied so as to promote the foreign object to be separated from the sensor unit. The substrate has a recess recessed in a thickness direction of the substrate.

摘要翻译： 浓度传感器装置包括传感器单元，基板和沉降限制单元。 传感器单元检测液体中包含的特定成分的浓度。 基板具有布置传感器单元的面。 沉降限制单元与传感器单元一体地布置或者沿着液体的流动方向布置在传感器单元的上游侧。 沉淀限制单元被配置为防止异物在传感器单元上​​的沉降。 沉降限制单元包括压电元件，当供电时振动，以促进异物与传感器单元分离。 基板具有在基板的厚度方向上凹陷的凹部。

公开(公告)号：US20100307246A1

公开(公告)日：2010-12-09

申请号：US12801405

申请日：2010-06-08

申请人： Tetsuo Fujii ,  Hisanori Yokura ,  Hirofumi Higuchi

发明人： Tetsuo Fujii ,  Hisanori Yokura ,  Hirofumi Higuchi

IPC分类号： G01P15/00 ,  H01L21/02 ,  H01L29/84

CPC分类号： H01L27/1203 ,  B81B2201/025 ,  B81B2201/0257 ,  B81B2201/0285 ,  B81B2201/047 ,  B81C1/00182 ,  G01C19/5755 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0814 ,  H01L21/84

摘要： A semiconductor dynamic quantity sensor has a substrate including a semiconductor substrate, an insulation layer on a main surface of the semiconductor substrate, and a semiconductor layer on the insulation layer. The main surface has a projection that is trapezoidal or triangular in cross section. The semiconductor layer is divided by a through hole into a movable portion. A tip of the projection is located directly below the movable portion and spaced from the movable portion by a predetermined distance in a thickness direction of the substrate. A width of the tip of the projection is less than a width of the movable portion in a planar direction of the substrate. The distance between the tip of the projection and the movable portion is equal to a thickness of the insulation layer.

摘要翻译： 半导体动态量传感器具有包括半导体衬底，半导体衬底的主表面上的绝缘层和绝缘层上的半导体层的衬底。 主表面具有横截面为梯形或三角形的突起。 半导体层由通孔分割成可动部。 突出部的尖端位于可动部的正下方，与基板的厚度方向与可动部隔开预定的距离。 突起的尖端的宽度小于基板的平面方向上的可动部的宽度。 突起的尖端和可动部之间的距离等于绝缘层的厚度。

公开(公告)号：US20100235107A1

公开(公告)日：2010-09-16

申请号：US12733694

申请日：2009-03-25

申请人： Kenji Fukumura ,  Tetsuo Yoshioka ,  Tetsuo Fujii ,  Takaaki Kawai ,  Hirofumi Higuchi ,  Teruo Oda ,  Yasuyuki Okuda

发明人： Kenji Fukumura ,  Tetsuo Yoshioka ,  Tetsuo Fujii ,  Takaaki Kawai ,  Hirofumi Higuchi ,  Teruo Oda ,  Yasuyuki Okuda

IPC分类号： G01N27/22 ,  G01N33/00

CPC分类号： G01N27/226 ,  G01N33/28

摘要： A concentration sensor device includes a sensor unit, a substrate, and a sedimentation limit unit. The sensor unit detects a concentration of a specific component contained in liquid. The substrate has a face to which the sensor unit is arranged. The sedimentation limit unit is integrally arranged with the sensor unit or arranged at an upstream side of the sensor unit in a flowing direction of the liquid. The sedimentation limit unit is configured to prevent sedimentation of a foreign object on the sensor unit. The sedimentation limit unit includes a piezoelectric element to vibrate when electricity is supplied so as to promote the foreign object to be separated from the sensor unit. The substrate has a recess recessed in a thickness direction of the substrate.

摘要翻译： 浓度传感器装置包括传感器单元，基板和沉降限制单元。 传感器单元检测液体中包含的特定成分的浓度。 基板具有布置传感器单元的面。 沉降限制单元与传感器单元一体地布置或者沿着液体的流动方向布置在传感器单元的上游侧。 沉淀限制单元被配置为防止异物在传感器单元上​​的沉降。 沉降限制单元包括压电元件，当供电时振动，以促进异物与传感器单元分离。 基板具有在基板的厚度方向上凹陷的凹部。

公开(公告)号：US20090284905A1

公开(公告)日：2009-11-19

申请号：US12453459

申请日：2009-05-12

申请人： Kouji Yamamoto ,  Hirofumi Higuchi ,  Masaki Inoue

发明人： Kouji Yamamoto ,  Hirofumi Higuchi ,  Masaki Inoue

IPC分类号： H05K7/00 ,  H05K13/04

CPC分类号： H01L21/565 ,  H01L23/5389 ,  H01L24/24 ,  H01L24/82 ,  H01L2224/24137 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01033 ,  H01L2924/01047 ,  H01L2924/01082 ,  H01L2924/14 ,  H01L2924/351 ,  Y10S257/923 ,  Y10T29/5313 ,  H01L2924/00

摘要： In a method of making an electronic apparatus, electronic devices and a mold are placed in a package such that pads of electronic devices are covered with the mold. An electrical insulator is poured into the package, in which the mold is placed, to fill the package. The mold is removed from the electrical insulator to form a space where the pads are exposed. An electrical conductor is placed in the space such that the pads are electrically connected together through the electrical conductor. The electrical conductor is in the form of a liquid or a solid having both fluidity and deformability.

摘要翻译： 在制造电子设备的方法中，将电子设备和模具放置在包装中，使得电子装置的垫被模具覆盖。 将电绝缘体注入到其中放置模具的包装中以填充包装。 将模具从电绝缘体上移除以形成焊盘露出的空间。 电导体被放置在空间中，使得焊盘通过电导体电连接在一起。 电导体是具有流动性和变形性的液体或固体的形式。

公开(公告)号：US08106486B2

公开(公告)日：2012-01-31

申请号：US12453459

申请日：2009-05-12

申请人： Kouji Yamamoto ,  Hirofumi Higuchi ,  Masaki Inoue

发明人： Kouji Yamamoto ,  Hirofumi Higuchi ,  Masaki Inoue

IPC分类号： H01L29/06 ,  H01R39/00

CPC分类号： H01L21/565 ,  H01L23/5389 ,  H01L24/24 ,  H01L24/82 ,  H01L2224/24137 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01033 ,  H01L2924/01047 ,  H01L2924/01082 ,  H01L2924/14 ,  H01L2924/351 ,  Y10S257/923 ,  Y10T29/5313 ,  H01L2924/00

摘要： In a method of making an electronic apparatus, electronic devices and a mold are placed in a package such that pads of electronic devices are covered with the mold. An electrical insulator is poured into the package, in which the mold is placed, to fill the package. The mold is removed from the electrical insulator to form a space where the pads are exposed. An electrical conductor is placed in the space such that the pads are electrically connected together through the electrical conductor. The electrical conductor is in the form of a liquid or a solid having both fluidity and deformability.

摘要翻译： 在制造电子设备的方法中，将电子设备和模具放置在包装中，使得电子装置的垫被模具覆盖。 将电绝缘体注入到其中放置模具的包装中以填充包装。 将模具从电绝缘体上移除以形成焊盘露出的空间。 电导体被放置在空间中，使得焊盘通过电导体电连接在一起。 电导体是具有流动性和变形性的液体或固体的形式。

公开(公告)号：US20140157902A1

公开(公告)日：2014-06-12

申请号：US14117050

申请日：2012-06-12

申请人： Makiko Sugiura ,  Hirofumi Higuchi

发明人： Makiko Sugiura ,  Hirofumi Higuchi

IPC分类号： G01S15/50

CPC分类号： G01S15/50 ,  B06B1/0666 ,  G01S7/521

摘要： An ultrasonic sensor device includes a substrate, a piezoelectric vibrator, and a Q-factor adjuster. The piezoelectric vibrator includes a pair of detection electrodes that face each other in a thickness direction of the substrate and a piezoelectric body interposed between the electrodes. The piezoelectric vibrator provides a membrane structure which is formed on a surface of the substrate and has rigidity lower than that of a remaining portion of the substrate. An ultrasonic wave is transmitted by the piezoelectric vibrator, and its reflected wave is received by the same piezoelectric vibrator. The Q-factor adjuster adjusts a Q-factor of the piezoelectric vibrator so that the Q-factor can be larger during a transmission period where the piezoelectric vibrator transmits the ultrasonic wave than during a reception period where the piezoelectric vibrator receives the ultrasonic wave.

摘要翻译： 超声波传感器装置包括基板，压电振动器和Q因子调节器。 压电振子包括在基板的厚度方向上彼此相对的一对检测电极和插在电极之间的压电体。 压电振动器提供形成在基板的表面上的膜结构，其刚性低于基板的剩余部分的刚度。 超声波由压电振子传递，其反射波被同一压电振子接收。 Q因子调节器调节压电振动器的Q因子，使得压电振动器发送超声波的传播期间的Q因子可以比在压电振动器接收超声波的接收时段期间更大。