发明授权
- 专利标题: Polysilicon plug bipolar transistor for phase change memory
- 专利标题(中): 用于相变存储器的多晶硅插头双极晶体管
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申请号: US13252152申请日: 2011-10-03
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公开(公告)号: US08237144B2公开(公告)日: 2012-08-07
- 发明人: Hsiang-Lan Lung , Erh-Kun Lai , Bipin Rajendran , Chung H. Lam
- 申请人: Hsiang-Lan Lung , Erh-Kun Lai , Bipin Rajendran , Chung H. Lam
- 申请人地址: TW Hsinchu US NY Armonk
- 专利权人: Macronix International Co., Ltd.,International Business Machines Corporation
- 当前专利权人: Macronix International Co., Ltd.,International Business Machines Corporation
- 当前专利权人地址: TW Hsinchu US NY Armonk
- 代理机构: Haynes Beffel & Wolfeld LLP
- 主分类号: H01L29/02
- IPC分类号: H01L29/02
摘要:
Memory devices and methods for manufacturing are described herein. A memory device described herein includes a plurality of memory cells. Memory cells in the plurality of memory cells comprise respective bipolar junction transistors and memory elements. The bipolar junction transistors are arranged in a common collector configuration and include an emitter comprising doped polysilicon having a first conductivity type, the emitter contacting a corresponding word line in a plurality of word lines to define a pn junction. The bipolar junction transistors include a portion of the corresponding word line underlying the emitter acting as a base, and a collector comprising a portion of the single-crystalline substrate underlying the base.
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