Invention Grant
- Patent Title: Corrosion-resistant high temperature pressure transducer employing a metal diaphragm
- Patent Title (中): 采用金属隔膜的耐腐蚀高温压力传感器
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Application No.: US13069222Application Date: 2011-03-22
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Publication No.: US08237537B2Publication Date: 2012-08-07
- Inventor: Anthony D. Kurtz
- Applicant: Anthony D. Kurtz , Nora Kurtz, legal representative
- Applicant Address: US NJ Leonia
- Assignee: Kulite Semiconductor Products, Inc.
- Current Assignee: Kulite Semiconductor Products, Inc.
- Current Assignee Address: US NJ Leonia
- Agency: Troutman Sanders LLP
- Agent James E. Schutz; Jihan A. R. Jenkins
- Main IPC: G01L1/22
- IPC: G01L1/22

Abstract:
A pressure transducer comprising a corrosion resistant metal diaphragm, having an active region, and capable of deflecting when a force is applied to the diaphragm; and a piezoresistive silicon-on-insulator sensor array disposed on a single substrate, the substrate secured to the diaphragm, the sensor array having a first outer sensor near an edge of the diaphragm at a first location and on the active region, a second outer sensor near an edge of the diaphragm at a second location and on the active region, and at least one center sensor substantially overlying a center of the diaphragm, the sensors connected in a bridge array to provide an output voltage proportional to the force applied to the diaphragm. The sensors are dielectrically isolated from the substrate.
Public/Granted literature
- US20110203381A1 CORROSION-RESISTANT HIGH TEMPERATURE PRESSURE TRANSDUCER EMPLOYING A METAL DIAPHRAGM Public/Granted day:2011-08-25
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