Invention Grant
- Patent Title: MEMS device with off-axis actuator
- Patent Title (中): 具有离轴执行器的MEMS器件
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Application No.: US13224525Application Date: 2011-09-02
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Publication No.: US08238011B1Publication Date: 2012-08-07
- Inventor: Yee-Chung Fu
- Applicant: Yee-Chung Fu
- Applicant Address: US CA San Jose
- Assignee: Advanced NuMicro Systems, Inc.
- Current Assignee: Advanced NuMicro Systems, Inc.
- Current Assignee Address: US CA San Jose
- Agency: Patent Law Group LLP
- Agent David C. Hsia
- Main IPC: G02B26/08
- IPC: G02B26/08
Abstract:
A micro-electro-mechanical system (MEMS) mirror device has a mirror, a frame rotatively coupled to the mirror, and a biaxial actuator rotatively coupled to the frame where the actuator is able to rotate about the rotational axes of the mirror and the frame with the mirror.
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