发明授权
- 专利标题： Methods for fabricating magnetic transducers using post-deposition tilting
- 专利标题（中）： 使用后沉积倾斜制造磁换能器的方法
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申请号： US12547224申请日： 2009-08-25
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公开(公告)号： US08240024B2公开(公告)日： 2012-08-14
- 发明人: Robert Glenn Biskeborn , Laurent Dellmann , Michel Despont , Philipp Herget , Pierre-Olivier Jubert
- 申请人： Robert Glenn Biskeborn , Laurent Dellmann , Michel Despont , Philipp Herget , Pierre-Olivier Jubert
- 申请人地址： US NY Armonk
- 专利权人： International Business Machines Corporation
- 当前专利权人： International Business Machines Corporation
- 当前专利权人地址： US NY Armonk
- 代理机构： Zilka-Kotab, PC
- 主分类号： G11B5/127
- IPC分类号： G11B5/127 ; H04R31/00
摘要：
In one general embodiment, a method for fabricating magnetic structures using post-deposition tilting includes forming a thin film magnetic transducer structure on a substantially planar portion of a substrate such that a plane of deposition of the thin film transducer structure is substantially parallel to a plane of the substrate. Additionally, the thin film transducer structure is caused to tilt at an angle relative to the plane of the substrate. The thin film transducer is fixed at the angle after being tilted.
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