Invention Grant
- Patent Title: Mechanical quantity sensor and method of manufacturing the same
- Patent Title (中): 机械量传感器及其制造方法
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Application No.: US12527554Application Date: 2008-06-24
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Publication No.: US08240205B2Publication Date: 2012-08-14
- Inventor: Akio Morii
- Applicant: Akio Morii
- Applicant Address: JP Tokyo
- Assignee: Dai Nippon Printing Co., Ltd.
- Current Assignee: Dai Nippon Printing Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
- Priority: JPP2007-167833 20070626
- International Application: PCT/JP2008/061444 WO 20080624
- International Announcement: WO2009/001815 WO 20081231
- Main IPC: G01C19/00
- IPC: G01C19/00

Abstract:
A mechanical quantity sensor includes a first structure having a fixed portion with an opening, a displaceable portion arranged in the opening and displaceable relative to the fixed portion, and a connection portion connecting the fixed portion and the displaceable portion, a second structure having a weight portion joined to the displaceable portion and a pedestal joined to the fixed portion, and arranged and stacked on the first structure, and a base having a driving electrode and a detection electrode arranged on a face facing the weight portion, connected to the pedestal, and arranged and stacked on the second structure. The second structure has a projection arranged in an area on a face of the weight portion facing the base, the area corresponding to an area where the driving electrode and the detection electrode are not arranged, the projection having a thickness larger than thicknesses of the driving electrode and the detection electrode.
Public/Granted literature
- US20100089156A1 MECHANICAL QUANTITY SENSOR AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2010-04-15
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