公开(公告)号：US08241923B2

公开(公告)日：2012-08-14

申请号：US12522786

申请日：2008-10-30

Applicant: Akio Morii

Inventor： Akio Morii

IPC: H01L21/00

CPC classification number: G01P15/125 ,  G01C19/5719 ,  G01C25/00 ,  G01P15/0802 ,  G01P15/123 ,  G01P2015/0828 ,  G01P2015/0842

Abstract: A method for correcting a mask pattern used for dry-etching an object with higher accuracy, and for manufacturing an acceleration sensor and an angular velocity sensor. The object is first etched by a dry-etching process using an uncorrected reference mask pattern. Then, distribution of the size of expansion of a tapered portion formed in a surface of the object is measured. Thereafter, the measured distribution is approximated by using a quadratic curve (Y=AX2+B) so as to determine A and B. Consequently, an amount t of correction for the tapered portion, which is expressed by the following equation (1) and related to a width of an opening of the mask pattern in a position at a distance r from a center of the object to be etched, can be set. In this way, the correction for the tapered portion can be carried out. t=(Ar2+B)/2  (1)

Abstract translation: 一种用于校正用于以更高精度对物体进行干法蚀刻的掩模图案，以及用于制造加速度传感器和角速度传感器的方法。 首先通过使用未校正的参考掩模图案的干蚀刻工艺蚀刻该物体。 然后，测量形成在物体的表面中的锥形部分的膨胀尺寸的分布。 此后，通过使用二次曲线（Y = AX2 + B）近似测量分布，以便确定A和B.因此，由下式（1）表示的锥形部分的校正量t和 可以设置与距离被蚀刻物的中心距离r的位置处的掩模图案的开口的宽度。 以这种方式，可以进行锥形部的校正。 t =（Ar2 + B）/ 2（1）

公开(公告)号：US08240205B2

公开(公告)日：2012-08-14

申请号：US12527554

申请日：2008-06-24

Applicant: Akio Morii

Inventor： Akio Morii

IPC: G01C19/00

CPC classification number: G01P15/125 ,  B81B3/0008 ,  B81B2201/0242 ,  B81C2203/031 ,  G01C19/56 ,  G01C25/00 ,  G01P15/0802 ,  G01P15/18 ,  G01P2015/084 ,  G01P2015/0842

Abstract: A mechanical quantity sensor includes a first structure having a fixed portion with an opening, a displaceable portion arranged in the opening and displaceable relative to the fixed portion, and a connection portion connecting the fixed portion and the displaceable portion, a second structure having a weight portion joined to the displaceable portion and a pedestal joined to the fixed portion, and arranged and stacked on the first structure, and a base having a driving electrode and a detection electrode arranged on a face facing the weight portion, connected to the pedestal, and arranged and stacked on the second structure. The second structure has a projection arranged in an area on a face of the weight portion facing the base, the area corresponding to an area where the driving electrode and the detection electrode are not arranged, the projection having a thickness larger than thicknesses of the driving electrode and the detection electrode.

Abstract translation: 机械量传感器包括具有开口的固定部分的第一结构，布置在开口中并相对于固定部分移位的位移部分和连接固定部分和可移位部分的连接部分，具有重量的第二结构 接合到可位移部分的部分和接合到固定部分的基座，并且布置和堆叠在第一结构上，以及基座，其具有布置在与基座相连的面对重物部分的面上的驱动电极和检测电极，以及 布置并堆叠在第二结构上。 第二结构具有布置在面对基部的配重部分的面上的区域中的突出部分，该区域对应于未布置驱动电极和检测电极的区域，突出部的厚度大于驱动 电极和检测电极。

公开(公告)号：US07910186B2

公开(公告)日：2011-03-22

申请号：US10279761

申请日：2002-10-24

Applicant: Akio Morii ,  Satoru Hamada ,  Hiroyuki Ohtaki ,  Kenji Ueda ,  Shingo Nishikawa

Inventor： Akio Morii ,  Satoru Hamada ,  Hiroyuki Ohtaki ,  Kenji Ueda ,  Shingo Nishikawa

IPC: B32B9/00 ,  B32B33/00 ,  B32B7/14 ,  B32B7/06 ,  G03H1/00

CPC classification number: G03H1/02 ,  B42D25/328 ,  G03H1/0011 ,  G03H1/0248 ,  G03H1/0256 ,  G03H1/202 ,  G03H2001/0413 ,  G03H2001/186 ,  G03H2001/2231 ,  G03H2240/50 ,  G03H2240/55 ,  G03H2250/10 ,  G03H2250/12 ,  G03H2250/35 ,  G03H2250/37 ,  G03H2250/39 ,  G03H2250/40 ,  G03H2250/42 ,  G03H2250/44 ,  G03H2260/12 ,  G03H2260/30 ,  G03H2270/12 ,  G09F3/0292 ,  G09F3/10 ,  G09F2003/028 ,  Y10S428/913 ,  Y10S428/915 ,  Y10T428/14 ,  Y10T428/1405 ,  Y10T428/1414 ,  Y10T428/1429 ,  Y10T428/1452 ,  Y10T428/1462 ,  Y10T428/1467 ,  Y10T428/1471 ,  Y10T428/1476 ,  Y10T428/1481 ,  Y10T428/1486 ,  Y10T428/149 ,  Y10T428/1495 ,  Y10T428/24802 ,  Y10T428/24851 ,  Y10T428/2486 ,  Y10T428/24868 ,  Y10T428/25 ,  Y10T428/252 ,  Y10T428/254 ,  Y10T428/2982

Abstract: A multilayered volume hologram structure of the invention comprises a substrate 2 for a certificate or the like, and an adhesive layer 5, a volume hologram layer 5 and a surface protective film 7 laminated on the substrate in the described order. When a multilayer structure consisting of the volume hologram layer 5 and surface protective layer 5 is forcibly released from the substrate for the purpose of making a photograph replacement or falsifying a personal information area, the volume hologram image can break down certainly, thereby ensuring prevention of falsification. A multilayered volume hologram structure-making label is useful for making a multilayered volume hologram structure.

Abstract translation: 本发明的多层体积全息图结构包括用于证书等的基板2，以及按照所述顺序层压在基板上的粘合层5，体积全息图层5和表面保护膜7。 当由体积全息图层5和表面保护层5构成的多层结构被强制地从基板上释放以便进行照片更换或伪造个人信息区域时，体积全息图图像可以肯定地分解，从而确保防止 伪造 多层体积全息图结构制作标签对于制造多层体积全息图结构是有用的。

公开(公告)号：US06762810B2

公开(公告)日：2004-07-13

申请号：US09987637

申请日：2001-11-15

Applicant: Kenji Ueda ,  Hideyuki Iriyama ,  Akio Morii

Inventor： Kenji Ueda ,  Hideyuki Iriyama ,  Akio Morii

IPC: G02F11335

CPC classification number: G02B5/0252 ,  G02B5/0268 ,  G02B5/0278 ,  G02B5/0284 ,  G02B5/32 ,  G02F1/133504 ,  G03H2001/0439 ,  G03H2001/2234

Abstract: The invention relates to a liquid crystal display device which enables a visual field range to be made wide and luminance drops to be reduced, so that bright displayed images can be presented, and provides a liquid crystal display device comprising, in order from a side of backlight 11, backlight 11, scatter plate 12, and liquid crystal element 20, wherein a transmission type of hologram scatter plate 13 is located in front of a display surface of liquid crystal display element 20. Hologram scatter plate 13, because of having been fabricated by means of single-step or two-step exposure, enables light more or less scattered through scatter plate 12 to be limitedly scattered within a given wide visual field range, so that bright displayed images can be presented over a wide visual field range yet with a reduced luminance drop. Scatter plate 12 may be omitted.

Abstract translation: 本发明涉及一种液晶显示装置，其使得视野范围变宽并且亮度降低，从而可以呈现明亮的显示图像，并且提供一种液晶显示装置，其从 背光源11，背光源11，散射板12和液晶元件20，其中全息散射板13的透射型位于液晶显示元件20的显示表面的前方。全息散射板13由于已经被制造 通过单步或两步曝光，可以使散射板12中散射的光或多或少散布在给定的宽视野范围内，从而使得明亮的显示图像可以在宽的视场范围内呈现， 降低亮度下降。 散射板12可以省略。

公开(公告)号：US6127067A

公开(公告)日：2000-10-03

申请号：US163979

申请日：1998-09-30

Applicant: Kenji Ueda ,  Shigehiko Tahara ,  Takehiko Anegawa ,  Akio Morii

Inventor： Kenji Ueda ,  Shigehiko Tahara ,  Takehiko Anegawa ,  Akio Morii

IPC: G02B5/32 ,  G03H1/02 ,  G03H1/04 ,  G03H1/20 ,  G03G1/04

CPC classification number: G03H1/0486 ,  G02B5/32 ,  G03H1/0248 ,  G03H1/0252 ,  G03H1/0256 ,  G03H1/20 ,  G03H1/2249 ,  G03H1/041 ,  G03H1/181 ,  G03H2001/0417 ,  G03H2001/186 ,  G03H2001/187 ,  G03H2001/207 ,  G03H2001/2263 ,  G03H2001/2289 ,  G03H2210/13 ,  G03H2210/30 ,  G03H2210/32 ,  G03H2210/562 ,  G03H2222/18 ,  G03H2223/24 ,  G03H2223/25 ,  G03H2227/04 ,  G03H2240/11 ,  G03H2250/10 ,  G03H2250/12 ,  G03H2250/33 ,  G03H2250/34 ,  G03H2250/35 ,  G03H2250/40 ,  G03H2250/44 ,  G03H2270/23 ,  Y10T156/1095 ,  Y10T156/1098 ,  Y10T428/24802 ,  Y10T428/24868 ,  Y10T428/24876 ,  Y10T428/24893 ,  Y10T428/24901

Abstract: The invention provides a hologram-recording subject plate comprising a block and a variety of subjects fixedly contained therein, which ensures easy, stable yet continuous recording of a multiplicity of identical holograms or different holograms reconstructible by illuminating light as is the case with a hologram-replicating method, a hologram-making method using the same, and a hologram-recorded article. The subject plate comprises a transparent solid block 5 and a hologram-recording subject S contained therein. A photosensitive material film 1 is applied directly onto one surface of the subject plate, and the subject plate is then irradiated with laser light 7 through the photosensitive material film 1. Such simple operation enables a multiplicity of identical holograms to be recorded in an easy, stable yet continuous manner.

Abstract translation: 本发明提供了一种全息记录对象板，其包括块和固定地容纳在其中的各种对象，其确保了通过照亮光可重建的多个相同的全息图或不同的全息图的容易，稳定但连续的记录，如全息图 - 复制方法，使用该方法的全息图制作方法和全息记录制品。 主题板包括透明固体块5和其中包含的全息记录对象S. 将感光材料膜1直接施加到主体板的一个表面上，然后通过感光材料膜1用激光7照射被摄体板。这种简单的操作使得可以将许多相同的全息图记录在容易， 稳定而连续的方式。

公开(公告)号：US08250918B2

公开(公告)日：2012-08-28

申请号：US12528052

申请日：2008-06-24

Applicant: Akio Morii

Inventor： Akio Morii

IPC: G01C19/00

CPC classification number: G01C19/5755 ,  G01P15/0802 ,  G01P15/125 ,  G01P15/14 ,  G01P15/18 ,  G01P2015/0842 ,  Y10T29/49126

Abstract: A mechanical quantity sensor includes a first structure having a fixed portion with an opening, a displaceable portion arranged in the opening and displaceable relative to the fixed portion, and a connection portion connecting the fixed portion and the displaceable portion, a second structure having a weight portion joined to the displaceable portion and a pedestal joined to the fixed portion, and arranged and stacked on the first structure, and a base having a driving electrode and a detection electrode arranged on a face facing the weight portion, connected to the pedestal, and arranged and stacked on the second structure. The second structure has a recessed portion arranged in an area on a face of the weight portion facing the second base, the area corresponding to an area where the driving electrode and the detection electrode are not arranged.

Abstract translation: 机械量传感器包括具有开口的固定部分的第一结构，布置在开口中并相对于固定部分移位的位移部分和连接固定部分和可移位部分的连接部分，具有重量的第二结构 接合到可位移部分的部分和接合到固定部分的基座，并且布置和堆叠在第一结构上，以及基座，其具有布置在与基座相连的面对重物部分的面上的驱动电极和检测电极，以及 布置并堆叠在第二结构上。 第二结构具有设置在面对第二基座的配重部分的面上的区域中的凹部，该区域对应于未布置驱动电极和检测电极的区域。

公开(公告)号：US20090305439A1

公开(公告)日：2009-12-10

申请号：US12522786

申请日：2008-10-30

Applicant: Akio Morii

Inventor： Akio Morii

IPC: H01L21/66 ,  H01L21/302

CPC classification number: G01P15/125 ,  G01C19/5719 ,  G01C25/00 ,  G01P15/0802 ,  G01P15/123 ,  G01P2015/0828 ,  G01P2015/0842

Abstract: A method for correcting a mask pattern used for dry-etching an object with higher accuracy, and for manufacturing an acceleration sensor and an angular velocity sensor. The object is first etched by a dry-etching process using an uncorrected reference mask pattern. Then, distribution of the size of expansion of a tapered portion formed in a surface of the object is measured. Thereafter, the measured distribution is approximated by using a quadratic curve (Y=AX2+B) so as to determine A and B. Consequently, an amount t of correction for the tapered portion, which is expressed by the following equation (1) and related to a width of an opening of the mask pattern in a position at a distance r from a center of the object to be etched, can be set. In this way, the correction for the tapered portion can be carried out. t=(Ar2+B)/2  (1)

Abstract translation: 一种用于校正用于以更高精度对物体进行干法蚀刻的掩模图案，以及用于制造加速度传感器和角速度传感器的方法。 首先通过使用未校正的参考掩模图案的干蚀刻工艺蚀刻该物体。 然后，测量形成在物体的表面中的锥形部分的膨胀尺寸的分布。 此后，通过使用二次曲线（Y = AX2 + B）近似测量分布，以便确定A和B.因此，由下式（1）表示的锥形部分的校正量t和 可以设置与距离被蚀刻物的中心距离r的位置处的掩模图案的开口的宽度。 以这种方式，可以进行锥形部的校正。 t =（Ar2 + B）/ 2（1）

公开(公告)号：US06815027B2

公开(公告)日：2004-11-09

申请号：US10279756

申请日：2002-10-24

Applicant: Akio Morii ,  Satoru Hamada ,  Hiroyuki Ohtaki ,  Kenji Ueda ,  Shingo Nishikawa

Inventor： Akio Morii ,  Satoru Hamada ,  Hiroyuki Ohtaki ,  Kenji Ueda ,  Shingo Nishikawa

IPC: B32B502

CPC classification number: G03H1/02 ,  B42D25/328 ,  G03H1/0011 ,  G03H1/0248 ,  G03H1/0256 ,  G03H1/202 ,  G03H2001/0413 ,  G03H2001/186 ,  G03H2001/2231 ,  G03H2240/50 ,  G03H2240/55 ,  G03H2250/10 ,  G03H2250/12 ,  G03H2250/35 ,  G03H2250/37 ,  G03H2250/39 ,  G03H2250/40 ,  G03H2250/42 ,  G03H2250/44 ,  G03H2260/12 ,  G03H2260/30 ,  G03H2270/12 ,  G09F3/0292 ,  G09F3/10 ,  G09F2003/028 ,  Y10S428/913 ,  Y10S428/915 ,  Y10T428/14 ,  Y10T428/1405 ,  Y10T428/1414 ,  Y10T428/1429 ,  Y10T428/1452 ,  Y10T428/1462 ,  Y10T428/1467 ,  Y10T428/1471 ,  Y10T428/1476 ,  Y10T428/1481 ,  Y10T428/1486 ,  Y10T428/149 ,  Y10T428/1495 ,  Y10T428/24802 ,  Y10T428/24851 ,  Y10T428/2486 ,  Y10T428/24868 ,  Y10T428/25 ,  Y10T428/252 ,  Y10T428/254 ,  Y10T428/2982

Abstract: A multilayered volume hologram structure of the invention comprises a substrate 2 for a certificate or the like, and an adhesive layer 5, a volume hologram layer 5 and a surface protective film 7 laminated on the substrate in the described order. When a multilayer structure consisting of the volume hologram layer 5 and surface protective layer 5 is forcibly released from the substrate for the purpose of making a photograph replacement or falsifying a personal information area, the volume hologram image can break down certainly, thereby ensuring prevention of falsification. A multilayered volume hologram structure-making label is useful for making a multilayered volume hologram structure.

公开(公告)号：US6075579A

公开(公告)日：2000-06-13

申请号：US758093

申请日：1996-11-27

Applicant: Kenji Ueda ,  Hideyuki Iriyama ,  Akio Morii

Inventor： Kenji Ueda ,  Hideyuki Iriyama ,  Akio Morii

IPC: G02B5/02 ,  G02B5/32 ,  G02F1/1335

CPC classification number: G02B5/0252 ,  G02B5/0268 ,  G02B5/0278 ,  G02B5/0284 ,  G02B5/32 ,  G02F1/133504 ,  G03H2001/0439 ,  G03H2001/2234

Abstract: The invention relates to a liquid crystal display device which enables a visual field range to be made wide and luminance drops to be reduced, so that bright displayed images can be presented, and provides a liquid crystal display device comprising, in order from a side of backlight 11, backlight 11, scatter plate 12, and liquid crystal element 20, wherein a transmission type of hologram scatter plate 13 is located in front of a display surface of liquid crystal display element 20. Hologram scatter plate 13, because of having been fabricated by means of single-step or two-step exposure, enables light more or less scattered through scatter plate 12 to be limitedly scattered within a given wide visual field range, so that bright displayed images can be presented over a wide visual field range yet with a reduced luminance drop. Scatter plate 12 may be omitted.

公开(公告)号：US20100089156A1

公开(公告)日：2010-04-15

申请号：US12527554

申请日：2008-06-24

Applicant: Akio Morii

Inventor： Akio Morii

IPC: G01C19/56 ,  H01L29/84 ,  H01L21/02

CPC classification number: G01P15/125 ,  B81B3/0008 ,  B81B2201/0242 ,  B81C2203/031 ,  G01C19/56 ,  G01C25/00 ,  G01P15/0802 ,  G01P15/18 ,  G01P2015/084 ,  G01P2015/0842

Abstract: A mechanical quantity sensor includes a first structure having a fixed portion with an opening, a displaceable portion arranged in the opening and displaceable relative to the fixed portion, and a connection portion connecting the fixed portion and the displaceable portion, a second structure having a weight portion joined to the displaceable portion and a pedestal joined to the fixed portion, and arranged and stacked on the first structure, and a base having a driving electrode and a detection electrode arranged on a face facing the weight portion, connected to the pedestal, and arranged and stacked on the second structure. The second structure has a projection arranged in an area on a face of the weight portion facing the base, the area corresponding to an area where the driving electrode and the detection electrode are not arranged, the projection having a thickness larger than thicknesses of the driving electrode and the detection electrode.

Abstract translation: 机械量传感器包括具有开口的固定部分的第一结构，布置在开口中并相对于固定部分移位的位移部分和连接固定部分和可移位部分的连接部分，具有重量的第二结构 接合到可位移部分的部分和接合到固定部分的基座，并且布置和堆叠在第一结构上，以及基座，其具有布置在与基座相连的面对重物部分的面上的驱动电极和检测电极，以及 布置并堆叠在第二结构上。 第二结构具有布置在面对基部的配重部分的面上的区域中的突出部分，该区域对应于未布置驱动电极和检测电极的区域，突出部的厚度大于驱动 电极和检测电极。