发明授权
US08241831B2 Acid generating agent for chemically amplified resist compositions
有权
用于化学放大抗蚀剂组合物的酸产生剂
- 专利标题: Acid generating agent for chemically amplified resist compositions
- 专利标题(中): 用于化学放大抗蚀剂组合物的酸产生剂
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申请号: US12231814申请日: 2008-09-05
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公开(公告)号: US08241831B2公开(公告)日: 2012-08-14
- 发明人: Sung-Do Jung , Jin-Ho Kim , Jung-Hoon Oh , Hyun-Soon Lim
- 申请人: Sung-Do Jung , Jin-Ho Kim , Jung-Hoon Oh , Hyun-Soon Lim
- 申请人地址: KR Seoul
- 专利权人: Korea Kumho Petrochemical Co., Ltd.
- 当前专利权人: Korea Kumho Petrochemical Co., Ltd.
- 当前专利权人地址: KR Seoul
- 代理机构: Davidson, Davidson & Kappel, LLC
- 优先权: KR10-2008-0046898 20080521
- 主分类号: G03F7/004
- IPC分类号: G03F7/004 ; C07C309/65
摘要:
An acid generating agent represented by the following formula (1) or (2) is provided, which is included in chemically amplified resist compositions: wherein in the formula (1) and (2), X represents an unsubstituted or substituted alkyl group having 1 to 20 carbon atoms and selected from alkyl, haloalkyl and alkylsulfonyl, which may have at least one hydrogen atom substituted by an ether group, an ester group, a carbonyl group, an acetal group, a nitrile group, a cyano group, a hydroxyl group, a carboxyl group or an aldehyde group, or represents a perfluoroalkyl group having 1 to 4 carbon atoms; R6 represents an alkyl group having 1 to 10 carbon atoms, an alkoxy group having 1 to 10 carbon atoms, or a heteroatom selected from nitrogen, sulfur, fluorine and oxygen; m is an integer from 0 to 2; and A+ is an organic counterion.