发明授权
- 专利标题: Non-contact displacement detecting device using optical astigmatism
- 专利标题(中): 非接触位移检测装置采用光学散光
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申请号: US12382077申请日: 2009-03-09
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公开(公告)号: US08247786B2公开(公告)日: 2012-08-21
- 发明人: Hideaki Tamiya , Kayoko Taniguchi
- 申请人: Hideaki Tamiya , Kayoko Taniguchi
- 申请人地址: JP Tokyo
- 专利权人: Magnescale Co., Ltd.
- 当前专利权人: Magnescale Co., Ltd.
- 当前专利权人地址: JP Tokyo
- 代理机构: Rader Fishman & Grauer, PLLC
- 优先权: JP2008-109467 20080418
- 主分类号: G01N21/86
- IPC分类号: G01N21/86 ; H01J3/14
摘要:
A displacement detecting device includes a non-contact sensor having a light source, an objective lens focusing output light from the light source onto a measurement surface, and a light receiving element detecting displacement information based on a focal length of the objective lens by using reflected light from the measurement surface; a control unit adjusting the focal length based on the displacement information; a displacement-amount measuring unit having a linear scale attached to the objective lens with a link member therebetween and measuring an amount of displacement of the linear scale when the focal length is adjusted. A light adjustment member is disposed between the light source and the objective lens or between the objective lens and the light receiving element and has an aperture section transmitting the output and/or reflected light therethrough and a light blocking section that blocks a specific light component of the output and/or reflected light.
公开/授权文献
- US20090261233A1 Displacement detecting device 公开/授权日:2009-10-22