DISPLACEMENT MEASURING APPARATUS
    1.
    发明申请
    DISPLACEMENT MEASURING APPARATUS 有权
    位移测量装置

    公开(公告)号:US20090033946A1

    公开(公告)日:2009-02-05

    申请号:US12177977

    申请日:2008-07-23

    IPC分类号: G01B11/02 G01B7/14

    CPC分类号: G01D5/56 G01D5/58

    摘要: Disclosed is a displacement measuring apparatus that includes a composite scale having a magnetic pattern and a diffraction grating each aligned in a direction of measuring axis, and a detector head moving in a direction of measuring axis relative to the composite scale. The detector head has a magnetic detection unit detecting a magnetic field exerted by the magnetic pattern to generate first reproduced signals, a light source irradiating the diffraction grating with light, and an optical detection unit detecting the light diffracted by the diffraction grating to generate second reproduced signals. In composite scale, the magnetic pattern and the diffraction grating are arranged such that a pitch of the first reproduced signals is larger than that of the second reproduced signals.

    摘要翻译: 公开了一种位移测量装置,其包括具有磁性图案和衍射光栅的复合刻度尺,所述复合刻度尺沿测量轴线的方向排列,以及检测器头沿相对于复合刻度的测量轴线的方向移动。 检测器头具有磁检测单元,其检测由磁图案施加的磁场以产生第一再现信号,用光照射衍射光栅的光源;以及光学检测单元,其检测由衍射光栅衍射的光以产生第二再现 信号。 在复合尺度中,磁图案和衍射光栅被布置成使得第一再现信号的间距大于第二再现信号的间距。

    Light-receiving/emitting composite unit, method for manufacturing the same, and displacement detection device
    2.
    发明申请
    Light-receiving/emitting composite unit, method for manufacturing the same, and displacement detection device 有权
    光接收/发射复合单元,其制造方法和位移检测装置

    公开(公告)号:US20070115479A1

    公开(公告)日:2007-05-24

    申请号:US11654815

    申请日:2007-01-18

    IPC分类号: G01B9/02

    CPC分类号: G01D5/38

    摘要: A displacement detection device having excellent stability with the lapse of time and suitable for reduction in size and weight includes: a light source for emitting light; polarizing light splitting unit for splitting the light emitted from the light source into two light beams having difference polarized components, radiating the two light beams to an external optical system, and combining the two light beams reflected by the external optical system to generate combined light; a phase plate provided between the light source and the polarizing light splitting unit and adapted for changing the polarization state of the light emitted from the light source and leading the light to the polarizing light splitting unit; light splitting films for splitting the combined light generated by the polarizing light splitting unit into plural light beams; polarizing units for transmitting only a predetermined polarized components of the split combined light beams; and light-receiving elements for photoelectrically converting coherent light beams transmitted through the polarizing units and thus generating an interference signal.

    摘要翻译: 具有优异的时间稳定性和适合于减小尺寸和重量的位移检测装置包括:用于发光的光源; 偏振光分离单元,用于将从光源发射的光分成具有差分偏振分量的两个光束,将两个光束照射到外部光学系统,并且组合由外部光学系统反射的两个光束以产生组合光; 设置在所述光源和所述偏振光分离单元之间的相位板,用于改变从所述光源发射的光的偏振状态并将光引导到所述偏振光分离单元; 用于将由偏振光分离单元产生的组合光分离成多个光束的分光膜; 用于仅透射分离的组合光束的预定偏振分量的偏振单元; 以及用于光电转换透射通过偏振单元的相干光束并由此产生干涉信号的光接收元件。

    Non-contact displacement detecting device using optical astigmatism
    3.
    发明授权
    Non-contact displacement detecting device using optical astigmatism 有权
    非接触位移检测装置采用光学散光

    公开(公告)号:US08247786B2

    公开(公告)日:2012-08-21

    申请号:US12382077

    申请日:2009-03-09

    IPC分类号: G01N21/86 H01J3/14

    摘要: A displacement detecting device includes a non-contact sensor having a light source, an objective lens focusing output light from the light source onto a measurement surface, and a light receiving element detecting displacement information based on a focal length of the objective lens by using reflected light from the measurement surface; a control unit adjusting the focal length based on the displacement information; a displacement-amount measuring unit having a linear scale attached to the objective lens with a link member therebetween and measuring an amount of displacement of the linear scale when the focal length is adjusted. A light adjustment member is disposed between the light source and the objective lens or between the objective lens and the light receiving element and has an aperture section transmitting the output and/or reflected light therethrough and a light blocking section that blocks a specific light component of the output and/or reflected light.

    摘要翻译: 位移检测装置包括具有光源的非接触传感器,将来自光源的测量表面上聚焦的物镜聚焦到测量表面上的光接收元件,以及通过使用反射镜检测基于物镜焦距的位移信息的光接收元件 来自测量表面的光; 控制单元,基于位移信息来调整焦距; 位移量测量单元,其具有附接到物镜上的线性标尺,其间具有连杆构件,并且当调整焦距时测量线性刻度的位移量。 光调节构件设置在光源和物镜之间或物镜和光接收元件之间,并且具有透过其输出和/或反射光的孔径部分和阻挡特定光分量的遮光部分 输出和/或反射光。

    Light-receiving/emitting composite unit, method for manufacturing the same, and displacement detection device
    4.
    发明授权
    Light-receiving/emitting composite unit, method for manufacturing the same, and displacement detection device 有权
    光接收/发射复合单元,其制造方法和位移检测装置

    公开(公告)号:US07336367B2

    公开(公告)日:2008-02-26

    申请号:US11654815

    申请日:2007-01-18

    IPC分类号: G01B9/02

    CPC分类号: G01D5/38

    摘要: A displacement detection device having excellent stability with the lapse of time and suitable for reduction in size and weight includes: a light source for emitting light; polarizing light splitting unit for splitting the light emitted from the light source into two light beams having difference polarized components, radiating the two light beams to an external optical system, and combining the two light beams reflected by the external optical system to generate combined light; a phase plate provided between the light source and the polarizing light splitting unit and adapted for changing the polarization state of the light emitted from the light source and leading the light to the polarizing light splitting unit; light splitting films for splitting the combined light generated by the polarizing light splitting unit into plural light beams; polarizing units for transmitting only a predetermined polarized components of the split combined light beams; and light-receiving elements for photoelectrically converting coherent light beams transmitted through the polarizing units and thus generating an interference signal.

    摘要翻译: 具有优异的时间稳定性和适合于减小尺寸和重量的位移检测装置包括:用于发光的光源; 偏振光分离单元,用于将从光源发射的光分成具有差分偏振分量的两个光束,将两个光束照射到外部光学系统,并且组合由外部光学系统反射的两个光束以产生组合光; 设置在所述光源和所述偏振光分离单元之间的相位板,用于改变从所述光源发射的光的偏振状态并将光引导到所述偏振光分离单元; 用于将由偏振光分离单元产生的组合光分离成多个光束的分光膜; 用于仅透射分离的组合光束的预定偏振分量的偏振单元; 以及用于光电转换透射通过偏振单元的相干光束并由此产生干涉信号的光接收元件。

    Displacement measuring apparatus
    5.
    发明授权
    Displacement measuring apparatus 有权
    位移测量仪

    公开(公告)号:US07808650B2

    公开(公告)日:2010-10-05

    申请号:US12177977

    申请日:2008-07-23

    IPC分类号: G01B11/02

    CPC分类号: G01D5/56 G01D5/58

    摘要: Disclosed is a displacement measuring apparatus that includes a composite scale having a magnetic pattern and a diffraction grating each aligned in a direction of measuring axis, and a detector head moving in a direction of measuring axis relative to the composite scale. The detector head has a magnetic detection unit detecting a magnetic field exerted by the magnetic pattern to generate first reproduced signals, a light source irradiating the diffraction grating with light, and an optical detection unit detecting the light diffracted by the diffraction grating to generate second reproduced signals. In composite scale, the magnetic pattern and the diffraction grating are arranged such that a pitch of the first reproduced signals is larger than that of the second reproduced signals.

    摘要翻译: 公开了一种位移测量装置,其包括具有磁性图案和衍射光栅的复合刻度尺,所述复合刻度尺沿测量轴线的方向排列,以及检测器头沿相对于复合刻度的测量轴线的方向移动。 检测器头具有检测由磁图案施加的磁场以产生第一再现信号的磁检测单元,用光照射衍射光栅的光源以及检测由衍射光栅衍射的光以产生第二再现的光学检测单元 信号。 在复合尺度中,磁图案和衍射光栅被布置成使得第一再现信号的间距大于第二再现信号的间距。

    Displacement detecting device
    6.
    发明申请
    Displacement detecting device 有权
    位移检测装置

    公开(公告)号:US20090261233A1

    公开(公告)日:2009-10-22

    申请号:US12382077

    申请日:2009-03-09

    IPC分类号: G02B27/40 G01B11/14 G01B11/02

    摘要: A displacement detecting device includes a non-contact sensor having a light source, an objective lens focusing output light from the light source onto a measurement surface, and a light receiving element detecting displacement information based on a focal length of the objective lens by using reflected light from the measurement surface; a control unit adjusting the focal length based on the displacement information; a displacement-amount measuring unit having a linear scale attached to the objective lens with a link member therebetween and measuring an amount of displacement of the linear scale when the focal length is adjusted. A light adjustment member is disposed between the light source and the objective lens or between the objective lens and the light receiving element and has an aperture section transmitting the output and/or reflected light therethrough and a light blocking section that blocks a specific light component of the output and/or reflected light.

    摘要翻译: 位移检测装置包括具有光源的非接触传感器,将来自光源的测量表面上聚焦的物镜聚焦到测量表面上的光接收元件,以及通过使用反射镜检测基于物镜焦距的位移信息的光接收元件 来自测量表面的光; 控制单元,基于位移信息来调整焦距; 位移量测量单元,其具有附接到物镜上的线性标尺,其间具有连杆构件,并且当调整焦距时测量线性刻度的位移量。 光调节构件设置在光源和物镜之间或物镜和光接收元件之间,并且具有透过其输出和/或反射光的孔径部分和阻挡特定光分量的遮光部分 输出和/或反射光。

    Light-receiving/emitting composite unit, method for manufacturing the same, and displacement detection device

    公开(公告)号:US07187449B2

    公开(公告)日:2007-03-06

    申请号:US10414860

    申请日:2003-04-15

    IPC分类号: G01B9/02

    CPC分类号: G01D5/38

    摘要: A displacement detection device having excellent stability with the lapse of time and suitable for reduction in size and weight includes: a light source for emitting light; polarizing light splitting unit for splitting the light emitted from the light source into two light beams having difference polarized components, radiating the two light beams to an external optical system, and combining the two light beams reflected by the external optical system to generate combined light; a phase plate provided between the light source and the polarizing light splitting unit and adapted for changing the polarization state of the light emitted from the light source and leading the light to the polarizing light splitting unit; light splitting films for splitting the combined light generated by the polarizing light splitting unit into plural light beams; polarizing units for transmitting only a predetermined polarized components of the split combined light beams; and light-receiving elements for photoelectrically converting coherent light beams transmitted through the polarizing units and thus generating an interference signal.

    Displacement pickup
    8.
    发明授权
    Displacement pickup 有权
    位移拾取

    公开(公告)号:US07034948B2

    公开(公告)日:2006-04-25

    申请号:US10692376

    申请日:2003-10-22

    IPC分类号: G01B9/02

    CPC分类号: G01D5/34707

    摘要: A displacement pickup is provided which includes a displaceable scale (12) having defined therein a first area (12a) where positional information is recorded with a predetermined pitch and a second area (12b) where positional information is recorded with a predetermined pitch different from that in the first area (12a), a first reading system (10) to read the positional information recorded in the first area (12a), a first phase detector (14) to detect a first phase on the basis of the positional information read by the first reading system (10), a second reading system (11) to read the positional information recorded in the second area (12b), a second phase detector (15) to detect a second phase on the basis of the positional information read by the second reading system (11), a phase comparator (16) to make a comparison between the first and second phases, and an origin signal generator (17) to generate an origin signal according to the result of comparison from the phase comparator (16).

    摘要翻译: 提供一种位移拾取器,其包括可移位标尺(12),其中限定了第一区域(12a),其中以预定间距记录位置信息;以及第二区域(12b),其中以预定间距记录位置信息 从第一区域(12a)中的第一相位检测器(12a)读取记录在第一区域(12a)中的位置信息的第一读取系统(10),基于第一区域 由第一读取系统(10)读取的位置信息,读取记录在第二区域(12b)中的位置信息的第二读取系统(11),第二相位检测器(15),用于基于 由第二读取系统(11)读取的位置信息,用于进行第一和第二相位之间的比较的相位比较器(16)和根据比较结果产生原点信号的原点信号发生器(17) n相位比较器(16)。

    Displacement pickup
    9.
    发明授权
    Displacement pickup 有权
    位移拾取

    公开(公告)号:US06879405B2

    公开(公告)日:2005-04-12

    申请号:US10705429

    申请日:2003-11-10

    IPC分类号: G01D5/347 G01D5/36 G01B11/14

    CPC分类号: G01D5/366 G01D5/34792

    摘要: A displacement pickup is provided which comprising a scale (12) having defined thereon a first area (12a) where positional information is recorded with a predetermined pitch and a second area (12b) where positional information is recorded with a pitch different from that in the first area (12a), a first reader (10) which reads the positional information recorded in the first area (12a), a first phase detector (14) which detects a first phase on the basis of the positional information read by the first reader (10), a second reader (11) which reads the positional information recorded in the second area (12b), a second phase detector (15) which detects a second phase on the basis of the positional information read by the second reader (11), a phase comparator (16) which makes a comparison between the first and second phases, and an origin signal selector (18) which produce a plurality of signals according to the result of comparison and selects an arbitrary one of the plurality of signals on the basis of the positional information read by the first reader (10).

    摘要翻译: 提供一种位移拾取器,其包括其上限定有以预定间距记录位置信息的第一区域(12a)的刻度(12),以及第二区域(12b),其中位置信息以不同于 第一区域(12a),读取记录在第一区域(12a)中的位置信息的第一读取器(10),第一相位检测器(14),其基于由第一读取器读取的位置信息检测第一相位 (10),读取记录在第二区域(12b)中的位置信息的第二读取器(11),第二相位检测器(15),其基于由第二读取器(11)读取的位置信息来检测第二相位 ),比较第一和第二相位的相位比较器(16)和根据比较结果产生多个信号的原点信号选择器(18),并选择多个信号中的任意一个 基于由第一读取器(10)读取的位置信息。